Skip to main content Accessibility help
×
Home

Dielectric Properties Of Low Dielectric Constant Polymeric Materials

  • Flora S. Ip (a1) (a2) and Chiu Ting (a1) (a3)

Abstract

Multilevel interconnects for high performance ULSI need low dielectric constant materials for inter-metal layer dielectric, or ILD, to reduce signal propagation delay, power consumption and cross talk noises. We have studied the physical, dielectric and processing properties of a wide variety of promising low dielectric polymeric materials for ILD applications. This paper presents capacitance values measured over a wide range of temperature, and a summary of the measured dielectric properties. The anisotropy 1,2 of dielectric properties were determined experimentally, the vertical (out-of-plane) dielectric properties were determined by MIM (Metal-Insulator-Metal) measurements, and the horizontal (in-plane) dielectric properties were determined by intra-line measurements of sub-half micron serpentine and comb test structures.

Copyright

References

Hide All
1. Boese, D., Herminghaus, S., Yoon, D. Y., Swalen, J. D., and Rabolt, J.F., ”Stiff Polyimides: Chain orientation and Anisotropy of the optical and Dielectric Properties of Thin Films,” MRS Symposium Proceedings, vol.227, pp. 379386.
2. Lin, L., PhD thesis: “Molecular Orientation Studies of Spin-Coated Polyimide Films”, Georgia Institute of Technology, April 1994.
3. Subramanian, et al., “Effect of Moisture on the Physical Properties of Polyimide Films”, MRS Symposium Proceedings, vol.227, pp. 147154.
4. Hasegawa, T., Kobayashi, T., Kadomura, S. and Aoyama, J., ”Simulaticn of Capacitance of Low Dielectric Interlayer,” DUMIC Conference Proceedings, 1995.
5. Schwartz, , Huang, Y-S, Patrick, W., ”The Effective Dielectric Constant of Silicon Dioxides Deposited in the Spaces Between Adjacent Conductors,” J. Electrochem. Soc., Vol.139, 12, pp. 118–122

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed