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Dicing of Fragile MEMS Structures

  • Peter Lange (a1), Norman Marenco (a2), Sven Gruenzig (a3), Stephan Warnat (a4) and Thilo Semperowitsch (a5)...

Abstract

Stealth dicing appears to be the appropriate methode to singulate surface sensitive microelectromechanical devices, without producing dicing debris or using water jet. The operating mode of the stealth dicing will be explained. A three dimensional integration project with open micromachined structures is taken as a reference to evaluate the advantages and limitations of this new dicing method. The preconditions for successful singulations will be discussed. Optical and SEM inspection results after successful separation will be discussed.

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[1] Marenco, N., Kostner, H., Reinert, W., and Hillmann, G., Smart System Integration, Barcelona (2008), Proceedings, p. 351
[2] Merz, P., Reinert, W., Reimer, K., Wagner, B., Konferenzband Mikrosystemtechnik-Kongress 2005, D/Freiburg, VDE Verlag, p.467470
[3] Kumagai, M., Uchiyama, N., Ohmure, E., Sugiura, R., Atsumi, K., and Fukumitsu, K., IEEE Transaction on Semiconductor Manufactoring, 20 (3), 2007, p.259
[4] Ohmura, E., Fukuyo, F., Fukumitsu, K., and Morita, H., JAMME, Vol 17 (1–2), 2006, 381
[5]. Monodane, T., Ohmura, E., Fukuyo, F., Fukumitsu, K., Morita, H., and Hirata, Y., JLMN-Journal of Laser Micro/Nanoengineering, Vol. 1 (3) 2006, 231
[6] von Allmen, M. F., Coupling of laser radiation to metals and semiconductors, in Bertolotti, M. (Ed), Physical Processes in Laser-Material Interactions, 1983 Plenum Press, New York, page 49
[7] Private communication with H.Bernt
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  • ISSN: -
  • EISSN: 1946-4274
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