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Diamond-Like Films Obtained by Sputtering from a Glassy Carbon Target

  • E. Niemann (a1), R. Herkert (a1) and D. Leidich (a1)

Abstract

Diamond-like a-C:H films were obtained by reactive dc-magnetron sputtering from a glassy carbon target in an argon-hydrogen atmosphere. To our knowledge, this is the first time that glassy carbon is used as target material. The a-C:H films are transparent and hard. The a-C:H films can be used as protection and antireflection coatings on a-Si:H photoreceptors. The electrical, optical and structural properties of the a-C:H films are examined.

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[2] Grill, A., Meyerson, B., Patel, V., J. Mater. Res. 3 (2), 214 (1988)
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Diamond-Like Films Obtained by Sputtering from a Glassy Carbon Target

  • E. Niemann (a1), R. Herkert (a1) and D. Leidich (a1)

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