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Diamond-Like Films as Optical and Protective Coatings

Published online by Cambridge University Press:  16 February 2011

D. Das Gupta ,
F. Demichelis ,
R. Spagnolo  and
A. Tagliaferro
D. Das Gupta
Affiliation:
Dipartimento di Fisica - Politecnico Torino - Torino – Italy I.E.N. Galileo Ferraris - Torino – Italy on leave from Phys. Dept. - North Bengal Univ. - Siliguri - India
F. Demichelis
Affiliation:
Dipartimento di Fisica - Politecnico Torino - Torino – Italy I.E.N. Galileo Ferraris - Torino – Italy
R. Spagnolo
Affiliation:
I.E.N. Galileo Ferraris - Torino – Italy
A. Tagliaferro
Affiliation:
Dipartimento di Fisica - Politecnico Torino - Torino – Italy I.E.N. Galileo Ferraris - Torino – Italy
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Abstract

Films of amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) are deposited by R.F. Magnetron Sputtering and Sputter Assisted Plasma CVD respectively and their properties are compared. It is found that high optical gap, high resistivity a-C can be obtained, so indicating a large amount of sp 3 bonded C atoms. For this reason attention was mainly focused on a-C and possible application were considered.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 188: Symposium K – Thin Films: Stresses and Mechanical Properties II , 1990 , 231
Copyright
Copyright © Materials Research Society 1990

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References

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