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Diamond-Like Carbon Film Propertffis From Optical and Electrical Measurements

Published online by Cambridge University Press:  10 February 2011

A. Dalton ,
P.B. Kosel ,
R. Monreal ,
S. Frees-carr ,
J. Weimer ,
R.L.C. Wu  and
W. Lanter
A. Dalton
Affiliation:
Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, Ohio 45221
P.B. Kosel
Affiliation:
Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, Ohio 45221
R. Monreal
Affiliation:
Department of Electrical and Computer Engineering, University of Cincinnati, Cincinnati, Ohio 45221
S. Frees-carr
Affiliation:
Wright Laboratory, Wright-Patterson AFB, Dayton, Ohio, 45433-6563
J. Weimer
Affiliation:
Wright Laboratory, Wright-Patterson AFB, Dayton, Ohio, 45433-6563
R.L.C. Wu
Affiliation:
K Systems Corporation, 1522 Marsetta Drive, Beavercreek, Ohio 45432
W. Lanter
Affiliation:
K Systems Corporation, 1522 Marsetta Drive, Beavercreek, Ohio 45432
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Abstract

High resistivity diamond-like carbon films have been grown on a variety of substrate surfaces using RF generated high-current hydrocarbon ion beams at low pressures. Stable films have been obtained in the thickness range of 0.3 to 1.2 �m with resistivities exceeding 1013 O-cm. These films have been deposited on smooth surfaces such as oxidized silicon, glass, quartz, aluminum and plastics. The films have smooth surfaces, great hardness and moderate dielectric constant (2.2 to 3.5). Optical absorption measurements show that these films are highly absorbing in the ultraviolet region of the spectrum and in the visible range their absorption coefficients exceed 104 cm-1 and the refractive indices fall in the range 1.75 to 2.17 at 632.8 nm.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 446: Amorphous and Crystalline Insulating Thin Films–1996 , 1996 , 407
Copyright
Copyright © Materials Research Society 1997

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References

1 Kosel, P.B., Wu, D., Kosel, O.P., Carr, S.F., Garscadden, A., Emmert, P.R., Wu, R.L.C., "Diamond-Like Carbon Films for High Temperature Electronic Applications" Electrochemical Society Proceedings, vol. 95-4, p. 681 (1995).Google Scholar
2 Wu, R.L.C., Lanter, W., Miyoshi, K., Heidger, S.L., Bletzinger, P., Garscadden, A., "Uniform and large area deposition of diamond-like carbon using RF source ion beams", Proc. MRS Symposium A; Beam-Solid Interactions for Material Synthesis and Characterization, vol. 354, pp. 63-68 (1995).Google Scholar