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Development of Hybrid MEMS/FIB Processes and Applications of Three-pronged Active Nanotweezers For Manipulation of Nano Objects

  • Xuefeng Wang (a1) and Chang Liu (a2)

Abstract

We report recent development of a three-probe micromachined nanomanipulator for manipulation and in-situ characterization of nanomaterials in scanning electron microscope (SEM). The nanomanipulator consists of three independent probes having thermal bimetallic actuators and nanoscopic end-effectors. Nanoscale end-effectors with sub-100-nm spacing are created using focused ion beam (FIB) milling to directly interface with nanoscopic objects (e.g., nanotubes, nanowires). Handling of individual carbon nanotubes (CNTs) was successfully realized with the nanomanipulator in an SEM.

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[1] Collins, P. G., Zettl, A., Bando, H., Thess, A., and Smalley, R. E., “Nanotube Nanodevice,” Science, vol.278, pp. 100102, 1997.
[2] Kan, S., Mokari, T., Rothenberg, E., and Banin, U., “Synthesis and Size-Dependent Properties of Zinc-Blende Semiconductor Quantum Rods,” Nature Materials, vol.2, pp. 155158, 2003.
[3] Melosh, N. A., Boukai, A., Diana, F., Gerardot, B., Badolato, A., Petroff, P. M., and Heath, J. R., “Ultrahigh-Density Nanowire Lattices and Circuits,Science, vol.300, pp. 112115, 2003.
[4] Baughman, R. H., Zakhidov, A. A., and de Heer, W. A., “Carbon Nanotubes-the Route Toward Applications,” Science, vol.297, pp. 787792, 2002.
[5] Kim, P., and Lieber, C. M., “Nanotube Nanotweezers,” Science, vol.286, pp. 21482150, 1999.
[6] Wang, X., Vincent, L., Yu, M., Huang, Y., and Liu, C., “Architecture of a Three-Probe MEMS Nanomanipulator with Nanoscale End-Effectors”, Proc. IEEE/ASME Inter. conf. Advanced Intelligent Mechatronics (AIM2003), pp 891896, Kobe, Japan, 20–24 July 2003.

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