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Development Of Diamond Based Power Microelectronics

Published online by Cambridge University Press:  10 February 2011

J. L. Davidson ,
W. P. Kang ,
Y. Gurbuz ,
D. V. Kerns ,
L. Davis ,
K. Holmes ,
L. Jiang ,
Venkata Pulugurta ,
W. Anurat  and
M. Howell
J. L. Davidson
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
W. P. Kang
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
Y. Gurbuz
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
D. V. Kerns
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
L. Davis
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
K. Holmes
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
L. Jiang
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
Venkata Pulugurta
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
W. Anurat
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
M. Howell
Affiliation:
ECE Dept., Vanderbilt School of Engineering, Vanderbilt University, Box 99–B, Nashville, TN 37027, jld@vuse.vanderbilt.edu
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Abstract

Diamond based power device structures such as resistor, capacitor, Schottky diode, p-n diode, thyristor, and field emitters are being investigated. Diamond resistors similar to standard thick film components in form and dimension were fabricated of polycrystalline diamond film. Using PECVD (plasma-enhanced chemical vapor deposition) processing to achieve diamond dielectric layers, high power, high energy density capacitors have been built. Despite grain boundaries and defects of polycrystalline diamond film, electronic devices such as field-effecttransistors and Schottky diodes have been developed. We have fabricated micro-patterned microtip arrays with this versatile new diamond technology as electron emitters. This paper will review diamond technology and results of this work.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 483: Symposium E – Power Semiconductor Materials & Devices , 1997 , 53
Copyright
Copyright © Materials Research Society 1998

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References

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