Skip to main content Accessibility help
×
Home

Development of Crystallographic Texture in RF Sputter Deposited CoCrTa/Cr Thin Films

  • Y. C. Feng (a1), D. E. Laughlin (a1) and D. N. Lambeth (a2)

Abstract

It is well known that Cr sputtered on glass or NiP/Al substrates has either the (002) or (110) crystallographic texture (depending on the substrate temperature) and that the Co-alloy layers which are deposited on the Cr underlayers have either the (1120) or (1011) textures respectively. However, the dependence of the crystallographic textures on other sputtering parameters is not clear. We report here on the study of the dependence of crystallographic textures of CoCrTa/Cr films on substrate bias. It is found that both Cr (110) and Cr (002) textures can form at elevated temperature, depending on the substrate bias. The development of the crystallographic texture is discussed with a Model. It is also found that the epitaxy of CoCrTa layer depends on the sputtering conditions of both the Cr and the CoCrTa layers. The extrinsic magnetic properties (such as He, S and S*) of thin films with various textures are also presented. By controlling the sputtering procedure, the effects of crystallographic textures on magnetic properties were separated from the effects of film Morphology.

Copyright

References

Hide All
1 Allen, J. C. and Fisher, R. D., IEEE Trans. Magn., MAG–23, 122 (1987).
2 Fisher, R. D., Allen, J. C. and Pressesky, J. L., IEEE Trans. Magn., MAG–22, 352 (1986).
3 Christner, J. A., Ranjan, R., Peterson, R. L. and Lee, J. I., J. Appl. Phys., 63 (8), 3260 (1988).
4 Hsu, Y., Sivertsen, J. M. and Judy, J. H., IEEE Trans. Magn., MAG–26, 1599 (1990).
5 Ohno, T., Shiroishi, Y., Hishiyama, S., Snzuki, H. and Matsuda, Y., IEEE Trans. Magn., MAG–23, 2809 (1987).
6 Lee, H. J., J. Appl. Phys., 57, 4037 (1985).
7 Duan, S. L., Artman, J.O., Wong, B. and Laughlin, D. E., J. Appl. Phys., 67 (9), 4913 (1990).
8 Feng, Y. C., Laughlin, D. E. and Lambeth, D. N., submited to J. Appl. Phys.
9 Daval, J. and Rabdet, D., IEEE Trans. Magn., MAG-5, 768 (1970).
10 Laughlin, D. E. and Wong, B. Y., IEEE Trans. Magn., MAG–27, 4713 (1991).
11 Shen, Y., Laughlin, D. E. and Lambeth, D. N., IEEE Trans. Magn., MAG–28, 3261 (1992).
12 Thornton, J. A., J. Vac. Sci. Technol., A4 (6), 3059 (1986).
13 Eckertova, L., Physics of Thin Films, p. 130, New York: Plenum Press (1986).
14 Zhu, J. G. and Bertram, H. N., IEEE Trans. Magn., MAG–24, 2706 (1988).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed