Hostname: page-component-7bb8b95d7b-cx56b Total loading time: 0 Render date: 2024-09-23T21:58:29.942Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of a Micromirror Using Piezoelectric Excited and Actuated Structures

Published online by Cambridge University Press:  15 February 2011

R. Maeda ,
C. Lee  and
A. Schroth
R. Maeda
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan, maeda@mel.go.jp
C. Lee
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan, maeda@mel.go.jp
A. Schroth
Affiliation:
Mechanical Eng. Lab., AIST, MITI, Namiki 1–2, Tsukuba, Ibaraki, 305 Japan, maeda@mel.go.jp
Get access

Abstract

The design and fabrication process of a micro-mirror device is presented. The device is driven by sol-gel deposited PZT-layer actuators. The mirror is designed to be able to carry out scanning in two lateral directions, and additionally movement in vertical direction using a FEMsimulation tool. The established fabrication process is described.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 444: Symposium I – Materials for Mechanical and Optical Microsystems , 1996 , 233
Copyright
Copyright © Materials Research Society 1997

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1. Motamedi, M. E., Opt. Eng. 33, 3505 (1994).Google Scholar
2. Hornbeck, L. J., Proc. Soc. Photo-Opt. Instrum. Eng., 1150, 86 (1990).Google Scholar
3. Deimel, P. P., J. Micromech. and Microeng., 1, 199 (1991).Google Scholar
4. Uenishi, Y., Tsugai, M., and Mehregany, M., J. Micromech. and Microeng., 5, 305 (1995).Google Scholar
5. Ching, M. T., Brennen, R. A., and White, R. M., Opt. Eng. 33, 3634 (1994).Google Scholar
6. Toshiyoshi, H. and Fujita, H., Proc. the 8th Int. Conf. Solid-State Sensors and Actuators (Transducers '95, Eurosensors IX) Stockholm, Sweden, 297 (1995).Google Scholar
7. Wu, M. C., Lin, L. Y., Lee, S. S., Pister, K. S. J., Sensors and Actuators A, 50, 127 (1995).Google Scholar
8. Breng, U., Gessner, T., Kaufmann, C., Kiehnscherf, R., and Markert, J., J. Micromech. and Microeng., 2, 256 (1992).Google Scholar
9. Asada, N., Matsuki, H., Minami, K., and Esashi, M., IEEE Trans. Magnetics, 30, 4647 (1994).Google Scholar
10. Ohtuka, Y., Nishikawa, H., Koumura, T., and Hattori, T., Proc. MEMS '95, Amsterdam, Netherlands, 305 (1995).Google Scholar
11. Tien, N. C., Solgaard, O., Kiang, M. H., Daneman, M., Lau, K. Y., Muller, R. S., Sensors and Actuators A, 52, 76 (1996).Google Scholar
12. Lee, C.: Piezoelectric PZT Thin Film Synthesized by Sol-gel Method and Its Applications to Micromachined Force Sensors for Scanning Force Microscope, Ph. D. Dissertation, The University of Tokyo, Tokyo (1996)Google Scholar