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Determining Thin Film Density by Energy-Dispersive X-Ray Reflectivity: Application to a Spin-On-Glass Dielectric

  • W. E. Wallace (a1) and W. L. Wu (a1)

Abstract

A novel method for determining thin film density by energy dispersive x-ray reflectivity is demonstrated for a polymer-derived spin-on-glass dielectric intended for microelectronics applications. The effects of sample misalignment limit the accuracy of x-ray reflectivity as typically practiced. These effects may be properly accounted for by measuring the critical angle for reflection at many different x-ray wavelengths simultaneously. From this measurement, thin film density can be ascertained with much improved accuracy. The results of the x-ray reflectivity measurement are compared to those derived from MeV ion scattering.

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Determining Thin Film Density by Energy-Dispersive X-Ray Reflectivity: Application to a Spin-On-Glass Dielectric

  • W. E. Wallace (a1) and W. L. Wu (a1)

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