Skip to main content Accessibility help
×
Home

Details of the Defect Profile in Self-ion Implanted Silicon

  • P.X. Zhang (a1), R.D. Goldberg (a1), I.V. Mitchell (a1), P.J. Schultz (a1) and D.J. Lockwood (a2)...

Abstract

Raman spectra excited at two laser wavelengths are used to study the damage in self-implanted silicon. It was found that the contributions from the damaged surface crystalline and a-Si layers can be distinguished and separated, based on the different light absorption coefficients. A defect-activated low frequency band in the damaged surface crystalline Si layer was revealed. In totally amorphized samples the Raman spectra excited by 457.9 and 647.1 nm show different scattering intensity ratios for the optical- and acoustic-like-phonons. This novel result seems to indicate a depth dependent variation of the disordering in the amorphous layer.

Copyright

References

Hide All
1 Roorda, S., Sinke, W.C., Poate, J.M., Jacobson, D.C., Dierker, S., Dennis, S.B., Eaglesham, D.J., Spaepen, F., and Fuoss, P.. Phys. Rev. B44, 3702 (1991).
2 Coffa, S., Priolo, F., and Battaglia, A.. Phys. Rev.Lett., 70, 3756 (1993).
3 Hayashi, N., Suzuki, R., Hasegawa, M., Kobayashi, N., Tanigawa, S., and Mikado, T.. Phys. Rev. Lett., 70, 45 (1993).
4 Simpson, P.J., Vos, M., Mitchell, I.V., Wu, C., and Schultz, P.J.. Phys. Rev. B44, 12180 (1991).
5 Stolk, P.A., Saris, F.W., Bemtsen, A.J.M., van derWeg, W.F., Sealy, L.T., Barklie, R.C., Kroetz, G. and Mueller, G., to be published.
6 Battaglia, A., Coffa, S., Priolo, F., Compagnini, G., and Baratta, G.A., to be published in Appl. Phys. Lett.
7 Zhang, P.X., Lockwood, D.J., Labbé, H.J., and Baribeau, J-M., Phys. Rev. B46, 9881 (1992).
8 Ley, L., Hydroqenated Amorphous Silicon II, ed. by Joannopoulos, J.D. and Lucovsky, G.. (Springer-Verlag, 1984), p. 140.
9 Humlicek, J., Garriga, M., Alonso, M.I., and Cardona, M.. J.Appl.Phys., 65, 2827 (1989).
10 See for example Light scattering in solids ed. by Cardona, M. and Guntherodt, G., ( Springer-Verlag, 1975), p. 25.
11 Zhang, P.X., Goldberg, R.D., Mitchell, I.V., Schultz, P.J., and Lockwood, D.J., to be published.
12 See for example Light Scattering in Solids (II), ed. by Cardona, M. and Guntherodt, G.. (Springer- Verlag, 1984), p. 22.
13 Yang, G., Bai, P., Wu, Y.-J., Tong, B.Y., Wong, S.K., Du, J., and Hill, I., MRS Symposium, Proceedings, 164, 321 (1990).
14 Avakyantz, L.P., Obraztsova, E.D., Proceedings of 13th Int. Conf. on Raman Spectr., ed. by Kiefer, W. et al. , (John Wiley & Sons, 1992), p. 985.

Details of the Defect Profile in Self-ion Implanted Silicon

  • P.X. Zhang (a1), R.D. Goldberg (a1), I.V. Mitchell (a1), P.J. Schultz (a1) and D.J. Lockwood (a2)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed