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Depth Sensitive Imaging of Defects in Epilayers and Single Crystals Using White Beam Synchrotron Radiation Topography in Grazing Bragg-Laue Geometry.

Published online by Cambridge University Press:  25 February 2011

M. Dudley ,
G.-D. Yao ,
J. Wu  and
H.-Y. Liu
M. Dudley
Affiliation:
Dept. of Materials Science & Engineering, State University of New York at Stony Brook, Stony Brook NY 11794.
G.-D. Yao
Affiliation:
Dept. of Materials Science & Engineering, State University of New York at Stony Brook, Stony Brook NY 11794.
J. Wu
Affiliation:
Dept. of Materials Science & Engineering, State University of New York at Stony Brook, Stony Brook NY 11794.
H.-Y. Liu
Affiliation:
Materials Science Laboratory, Texas Instruments Inc., P.O. Box 655936, Mail Stop 147, Dallas, TX 75265.
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Abstract

The technique of Synchrotron White Beam topographic imaging in grazing Bragg-Laue geometries has been developed at the Stony Brook synchrotron topography station at the NSLS. This technique enables imaging of defects in subsurface regions of thickness which can range from hundreds of Angstroms to hundreds of microns as determined by the penetration depth of the X-rays. This penetration depth, which is shown to be determined by the kinematical theory of X-ray diffraction, can be conveniently varied, in a controlled manner, by simple manipulation of the diffraction geometry, thereby enabling a depth profiling of the defect content.

The fundamentals of the technique are described, and its advantages and disadvantages compared to existing techniques are discussed in detail. Examples of application of the technique in the characterization of defects in thin epitaxial films of GaAs on Si, are given, and the general applicability of the technique is discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 163: Symposium G – Impurities, Defects and Diffusion in Semiconductors: Bulk and Layered Structures , 1989 , 1031
Copyright
Copyright © Materials Research Society 1990

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