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Deposition of ITO Film on Ion Beam Treated Polymers

  • Shih Hsiu Hsiao (a1), Tetsuro Yamaguchi (a2), Yoshikazu Tanaka (a3) and Ari Ide-Ektessabi (a4)


Indium oxide doped with tin oxide, ITO, is extensively used to fabricate transparent conductive coatings. ITO thin film on flexible substrates has been used in applications including touch panel contacts, electrodes for LCD and Plasma displays. ITO thin film can be deposited onto polymer substrates using electron-beam evaporation. Surface modification of polymer substrate improves its superficial properties, adhesion in particular, to meet specific requirements while retaining the good mechanical properties of the substrates. In this study, a system consists of a linear ion beam and an electron beam which have been developed in vacuum. The linear ion beam treats the polymer surface while simultaneously the ITO thin film is deposited onto the surface using electron-beam evaporation. We demonstrated that polymer surface treated with the ion beam has been improved. Moreover, the linear ion beam source provides good uniformity of surface treatment and is very suitable for production-scale processes. An integrated electron-beam evaporation and linear ion beam system significantly increases the chemical compatibility of a polymer surface to an over-layer.



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1 Intertech Corporation 2004 “Flexible Display and Electronics”.
2 Leterrier, Y., Medico, L., Demarco, F., Manson, J.-A.E., Betz, U., Escola, M.F., Olsson, M. Kharrazi, Atamny, F., “Mechanical integrity of transparent conductive oxide films for flexible polymer-based displays”, Thin Solid Films 460 (2004) 156166
3 Ektessabi, A.M., Hakamata, S., “XPS study of ion beam modified polyimide films”, Thin Solid Films 377–378 (2000) p 621625.
4 Hanley, Luke, Sinnott, Susan B., “The growth and modification of materials via ion-surface processing”, Surface Science 500 (2002) p 500522
5 Hirakata, Hiroyuki, Kitamura, Takayuki, Kusano, Takato, “Pre-cracking technique for fracture mechanics experiments along interface between thin film and substrate”, Engineering Fracture Mechanics 72 (2005) p 18921904
6 Jordan, J. L., Kovac, C. A., Morar, J. F., and Pollak, R. A., “High-resolution photoemission study of the interfacial reaction of Cr with polyimide and model polymers”, Physical Review B, Third series, Volume 36, Number 4. 15 July, 1987.


Deposition of ITO Film on Ion Beam Treated Polymers

  • Shih Hsiu Hsiao (a1), Tetsuro Yamaguchi (a2), Yoshikazu Tanaka (a3) and Ari Ide-Ektessabi (a4)


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