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Deposition and Properties of Doped Diamondlike Carbon Films Produced by Dual-Source Vacuum Arc Plasma Immersion

  • O. R. Monteiro (a1), M. P. Delplancke-Ogletree (a2), I. G. Brown (a1) and J. W. Ager (a1)

Abstract

Diamond-like carbon films with mechanical properties approaching those of diamond have been consistently produced by cathodic vacuum arc based techniques. These films have been successfully used in applications where enhanced hardness and wear resistance are required Such DLC films have two major drawbacks that prevent their application in other areas: a high level of internal stresses, which promotes failure by spallation of thick films; and the loss of mechanical properties at temperatures higher than 300°C. In this paper we describe the effect of doping elements on the room-temperature mechanical properties and on the thermal stability of DLC films upon annealing in air. The effect of the presence of W and Ti was investigated and compared to pure DLC. The films were produced by dual-source metal plasma immersion ion implantation and deposition with magnetic filtering to remove macroparticles from the plasma; dopant content was controlled by varying the relative pulse duration of the two plasma sources. Microstructural and chemical characterization of the films are presented.

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Deposition and Properties of Doped Diamondlike Carbon Films Produced by Dual-Source Vacuum Arc Plasma Immersion

  • O. R. Monteiro (a1), M. P. Delplancke-Ogletree (a2), I. G. Brown (a1) and J. W. Ager (a1)

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