Skip to main content Accessibility help
×
Home

Dependence Of Silicon Fracture Strength And Surface Morphology On Deep Reactive Ion Etching Parameters

  • Kuo-Shen Chen (a1), Arturo A. Ayon (a1), Kevin A. Lohner (a1), Mark A. Kepets (a1), Terran K. Melconian (a1) and S. Mark Spearing (a1)...

Abstract

The development of a high power-density micro-gas turbine engine is currently underway at MIT. The initial goal is to produce the components by deep reactive ion etching (DRIE) single crystal silicon. The capability of the silicon structures to withstand the very high stress levels within the engine limits the performance of the device. This capability is determined by the material strength and by the achievable fillet radii at the root of turbine blades and other etched features rotating at high speeds. These factors are strongly dependent on the DRIE parameters. Etching conditions that yield large fillet radii and good surface quality are desirable from a mechanical standpoint. In order to identify optimal DRIE conditions, a mechanical testing program has been implemented. The designed experiment involves a matrix of 55 silicon wafers with radiused hub flexure specimens etched under different DRIE conditions. The resulting fracture strengths were determined through mechanical testing, while SEM analysis was used to characterize the corresponding fillet radii. The test results will provide the basis for process optimization of micro-turbomachinery fabrication and play an important role in the overall engine redesign.

Copyright

References

Hide All
[1]. Epstein, A. H, et al, “Micro-Heat Engines, Gas Turbines, and Rocket Engines - the MIT Microengine Project,” 28th AIAA Fluid Dynamics and 4th AIAA Shear Flow Control Conference, June 1997.
[2]. Chen, K-S, Ayon, A., and Spearing, S. M. [1997]: “Tailoring and Testing the Fracture Strength of Silicon at the Mesoscale,” To be published in Journal of American Ceramic Society.
[3]. Chen, K-S, Ayon, A., and Spearing, S. M. [1998]: “Silicon Strength Testing for Mesoscale Structural Applications,” Symposium N3.8, MRS Spring Meeting, April 13–17, San Francisco, CA.
[4]. Chen, K-S, Ph.D.Thesis, Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA, 1998.
[5]. Ayon, A. A., Bayt, R., Braff, R., Lin, C., Sawin, H. H., and Schmidt, M. A., Technical Digest, Solid- State Sensor and Actuator Workshop, Hilton Head, SC, June 8–11, 1998, pp. 4144.
[6]. Ayon, A.A., Chen, K-S, Lohner, K.A., Sawin, H.H., Schmidt, M.A., and Spearing, S.M. [1998]: “Dependence of Silicon Surface Morphology on Time Multiplexed Deep Etching Conditions,” To be appeared, MRS Fall Meeting, Boston, MA, Nov. 1998.
[7]. Weibull, W [1939]: Ing. Vetenskaps Akad. Handl., No. 151, pp. 45, 1939.
[8]. Nemeth, N. N., Manderscheid, J. M., and Gyekenyesi, J. P., NASA TP-2916, 1990.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed