Skip to main content Accessibility help
×
Home

Dependence of Hardness and Stiffness on Density of Ta2O5 and TiO2 Layers

  • S. P. Baker (a1), C. R. Ottermann (a2), M. Laube (a3), F. Rauch (a3) and K. Bange (a2)...

Abstract

Highly refractive amorphous TiO2 and Ta2O5 films with thicknesses between 270 and 514 nm were deposited on fused silica glass substrates by reactive evaporation and reactive ion plating. Density, hardness, and stiffness were investigated as a function of deposition process. The films were examined using Rutherford backscattering spectroscopy and were found to have densities between 72 and 100% of those of the corresponding bulk oxides. Nanoindentation studies indicated a strong correlation between density and both hardness and elastic stiffness of the oxide film materials. Hardness and modulus both varied by more than 40% over this density range.

Copyright

References

Hide All
1. Ottermann, C., Otto, J., Jeschkowski, U., Anderson, O., Heming, M. and Bange, K., in Thin Films: Stresses and Mechanical Properties IV, (Edited by Townsend, P. H., Weihs, T. P., Jr, J. E. S.. and Børgesen, P.). Proc. Materials Research Society, Vol.308, (1993) p. 69.
2. Ottermann, C.R., Heming, M. and Bange, K., in Thin Films: Stresses and Mechanical Properties V, (Edited by Baker, S. P., Ross, C. A., Townsend, P. H., Volkert, C. A. and Børgesen, P.). Proc. Materials Research Society, Vol.356, (1995) p. 187.
3. Ottermann, C., Temmink, A. and Bange, K., Proc. SPIE 1272, 111 (1990).
4. Doolittle, L.R., Nucl. Instrum. Methods B 9, 344 (1985).
5. Laube, M., Rauch, F., Ottermann, C., Anderson, O. and Bange, K., Nucl. Instrum. Methods B in press.
6. Nano Instruments Inc., “Nanoindenter II,” Oak Ridge, TN
7. Oliver, W.C. and Pharr, G.M., J. Mater. Res. 7, 1564 (1992).
8. Martin, P.J., Benavid, A., Swain, M., Netterfield, R.P., Kinder, T.J., Sainty, W.G., Drage, D. and Wielunsky, L., Thin Solid Films 239, 181 (1993).
9. Scholze, H., Glass: nature, structure and properties, Springer-Verlag, New York (1991).
10. Li, H. and Bradt, R.C., Journal of Non-Crystalline Solids 146, 197 (1992).
11. Laursen, T.A. and Simo, J.C., J. Mater. Res. 7, 618 (1992).
12. Ottermann, C.R., Bange, K., Braband, A., Haefke, H. and Gutmannsbauer, W., elsewhere in these Proceedings
13. Ottermann, C.R., Kuschnereit, R., Anderson, O., Hess, P. and Bange, K., elsewhere in these Proceedings

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed