Skip to main content Accessibility help
×
Home

Dependence of Buried CoSi2 Resistivity on ION Implantation and Annealing Conditions1

  • Fereydoon Namavar (a1), N. M. Kalkhoran (a1), J. M. Manke (a1), L. Luo (a2) and J. T. McGinn (a3)...

Abstract

We have investigated the dependence of electrical and material properties of buried CoSi2 layers on Co+ implantation and annealing conditions. The results indicated that the electrical resistivity and crystalline quality of the implanted buried CoSi2 layers depend strongly on the implantation temperature. CoSi2 layers with the lowest resistivity and best crystalline quality (Xmin as low as 3.6%) were obtained from samples implanted at 300°C-400°C. Implantation at higher temperatures (e.g., 580°C) produced cobalt disilicide layers with significantly higher electrical resistivity and a Xmin of about 10.7%.

Copyright

References

Hide All
1. Chadda, T.B.S. and Wolf, M., Recl. of the 10th IEEE Photovoltaic Specialists Conference, Palo Alto, 1973, p. 52.
2. Sater, B.L., Brandhorst, H.W. Jr, Riley, T.J., and Hart, R.E. Jr, Rec. of the 10 IEEE Photovoltaic Specialists Conference, Palo Alto, 1973, p. 188.
3. Goradia, C., Ziegman, R., and Sater, B.L., Rec. of the 12th IEEE Photovoltaic Specialists Conference, Baton Rouge, 1976, p. 781.
4. Goradia, C. and Goradia, M.G., Rec. of the 12th IEEE Photovoltaic Specialists Conference, Baton Rouge, 1976, p. 789.
5. Walker, G.H. and Heinbockel, J.H., NASA Conference Publication 2475, Space Photovoltaic Research and Technology Conference, Cleveland, 1986, p. 133.
6. Walker, G.H. and Heinbockel, J.H., Solar Cells, 22, 55 (1987).
7. Walker, G.H., 18th Intersociety Energy Conversion Engineering Conference, Orlando, 1983, p. 1194.
8. White, A.E., Short, K.T., Dynes, R.C., Garno, J.P., and Gibson, J.M., Mat. Res. Soc. Symp. Proc. 74, 481 (1987).
9. Maex, K., White, A.E., Short, K.T., Hsieh, Y.-F., and Hull, R., J. Appl. Phys. 68(11) 5641(1990).
10. Jebasinski, R., Mantl, S., Radermacher, K., Fichtner, P., Jager, W., and Buchal, Ch., Mat. Res. Soc. Symp. Proc. 201, 411 (1991).
11. Tan, Z., Budnick, J.I., Sanchez, F.H., Tourillon, G., Namavar, F., and Hayden, H.C., Physical Review 40(9) 6368 (1989).
12. Namavar, F., Cortesi, E., Pinizzotto, R.F., and Yang, H., Mat. Res. Soc. Symp. Proc. 157, 179 (1989).
13. Namavar, F., Cortesi, E., and Sioshansi, P., Mat. Res. Soc. Symp. Proc., 128, 623 (1989).

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed