Skip to main content Accessibility help
×
Home

Defects in Microcrystalline Silicon Prepared With Hot Wire CVD

  • F. Finger (a1), S. Klein (a1), T. Dylla (a1), A. L. Baia Neto (a2), O. Vetterl (a1) and R. Carius (a1)...

Abstract

The influence of the preparation conditions in hot wire chemical vapour deposition (HWCVD) on the electronic properties of microcrystalline silicon is investigated in view of application of the material in thin film solar cells. Poor grain boundary passivation, as a result of hydrogen etching at strong hydrogen dilution of the process gas or thermal desorption of hydrogen at high deposition temperatures, is considered a main obstacle for material optimisation. We conclude that optimum μc-Si:H solar cell material, both from HW-CVD and from plasma enhanced CVD, is not necessarily obtained with largest grain sizes and apparent highest crystalline content, but rather by a material prepared under conditions which yield a compact morphology with an effective grain boundary passivation.

Copyright

References

Hide All
1. Keppner, H., Meier, J., Torres, P., Fischer, D., Shah, A., Appl. Phys. A 69 (1999) 169.
2. Yamamoto, K., Yoshimi, M., Tawada, Y., Okamoto, Y. and Nakajima, A.: J. Non-Cryst. Solids 266-269 (2000) 1082.
3. Vetterl, O., Dasgupta, A., Lambertz, A., Stiebig, H., Finger, F. and Wagner, H.: Mater. Res. Soc. Symp. Proc. 664 (2001) A25.8
4. Rech, B., Kluth, O., Repmann, T., Roschek, T., Springer, J., Müller, J., Finger, F., Stiebig, H. and Wagner, H., Solar Energy Materials and Solar Cells (2002), in press.
5. Nasuno, Y., Kondo, M. and Matsuda, A., Mater. Res. Soc. Symp. Proc. 664 (2001) A15.5.
6. Matsumura, H., Jpn. J. Appl. Phys. 37 (1998) 3175.
7. Middya, A. R., Lloret, A.A., Perrin, J., Huc, J., Moncel, J. L., Parey, J. Y., Rose, G., Mater. Res. Soc. Symp. Proc. 377 (1995) 119.
8. Rath, J. K., Tichelaar, F. D., Meiling, H. and Schropp, R. E. I.: Mater. Res. Soc. Symp. Proc. 507 (1998) 879.
9. Klein, S., Finger, F., Carius, R., Wagner, H., Stutzmann, M., Thin Solid Films 395 (2001) 305.
10. Klein, S., Wolff, J., Finger, F., Carius, R., Wagner, H. and Stutzmann, M., Jpn. J. Appl. Phys. 41 (2002) L10.
11. Klein, S., Finger, F., Carius, R., Rech, B., Stutzmann, M., this conference, (2002) A26.2
12. Vetterl, O., Carius, R., Houben, L., Scholten, C., Luysberg, M., Lambertz, A., Finger, F., Wagner, H., Mater. Res. Soc. Symp. Proc. 609 (2000) A15.2.
13. Malten, C., Berichte des Forschungszentrum Jülich 3272 (1996) ISSN 0944-2952.
14. Veprek, S., Sarott, F. A., Z. Iqpal, Phys. Rev. B 36 (1987) 3344.
15.A. L. Baia Neto, Lambertz, A., Carius, R. and Finger, F., J. Non-Cryst. Solids (2002) in press.
16. Beyer, W. and Abo, M.S. Ghazala: Mater. Res. Soc. Symp. Proc. 507 (1998) 601.
17. Luysberg, M., Hapke, P., Carius, R. and Finger, F., Phil. Mag. A 75 (1997), 31.
18. Houben, L., Luysberg, M., Hapke, P., Carius, R., Finger, F., Wagner, H., Phil. Mag. A 77 (1998), 1447.
19. Finger, F., Carius, R., Hapke, P., Houben, L., Luysberg, M. and Tzolov, M., Mat. Res. Soc. Symp. Proc. 452 (1997) 725.
20. Finger, F., M, J.üller, Malten, C., Carius, R. and Wagner, H., J. Non-Cryst. Solids, 266-269 (2000) 511.
21. Tzolov, M., Finger, F., Carius, R. and Hapke, P., J. Appl. Phys. 81 (1997) 7376.
22. Beyer, W. (2002) private communication.
23. Beyer, W., Hoheisel, B., Solid State Comm. 47 (1983) 573.
24. Kondo, M., Yamasaki, S., Matsuda, A., J. Non-Cryst. Solids, 266-269 (2000) 544.
25. Brammer, T., Stiebig, H., this conference, (2002) A6.2.
26. Vetterl, O., Gross, A., Jana, T., Ray, S., Lambertz, A., Carius, R., Finger, F., J. Non-Cryst. Solids, (2002) in press.
27. Dylla, T., Carius, R., Finger, F., this conference, (2002) A20.9.

Related content

Powered by UNSILO

Defects in Microcrystalline Silicon Prepared With Hot Wire CVD

  • F. Finger (a1), S. Klein (a1), T. Dylla (a1), A. L. Baia Neto (a2), O. Vetterl (a1) and R. Carius (a1)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed.