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Defect Reduction in Mocvd Grown Si/GaAs

  • M.M. Al-Jassim (a1), Takashi Nishioka (a2), Yoshio Itoh (a2), Akio Yamamoto (a2) and Masafumi Yamaguchi (a2)...

Abstract

The effectiveness of thermal annealing and strained layer superlattices (SLS's) in defect reduction in Si/GaAs structures was studied. The GaAs layers were grown on (100) Si substrates by low pressure MOCVD. They were evaluated by TEM, HREM, EBIC and PL. As-grown layers contained dislocation densities in the 108-109 cm−2 range, depending on the layer thickness. Post-growth and in situ annealing were performed on a wide variety of these structures. TEM examination showed that in situ annealing was more effective as it resulted in confining a large portion of the threading dislocations to the interface region. Furthermore, the interaction of threading dislocations to form closed loops was evident. Additionally, the effect of GaAs/GaInAs and GaInAs/GaAsP SLS's on dislocation bending was investigated. The former SLS, although not lattice matched to GaAs, proved more effective.

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1 See for example. Proc. of the MRS Symposium on Heteroepitaxy on Si II, Vol. 91 (1987).
2 Chand, N., People, R., Baiocchi, F.A., Wecht, K.W. and Cho, A.Y., Appl. Phys. Lett., 49, 815 (1986).
3 Lee, J.W., Shichijo, H., Tsai, H.L. and Matyi, R.J., Appl. Phys. Lett., 50, 31 (1987).
4 EI-Masry, N., Hamaguchi, N., Tarn, J.C.L., Karam, N., Humphreys, T.P., Moore, D. and Bedair, S.M., Mat. Res. Soc., Symp,, Proc. 91, 99 (1987).
5 Ahrenkiel, R.K., Dunlavy, D.J. and Hanak, T., Solar Cells (1988) in press.
6 Yamamoto, Akio and Yamaguchi, Masafumi, this symposium.
7 Matthews, J.W. and Blakeslee, A.E., J. Cryst. Growth, 32, 265 (1976).

Defect Reduction in Mocvd Grown Si/GaAs

  • M.M. Al-Jassim (a1), Takashi Nishioka (a2), Yoshio Itoh (a2), Akio Yamamoto (a2) and Masafumi Yamaguchi (a2)...

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