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CW Laser Crystallization of Soi Thermal analysis of the most critical parameters
Published online by Cambridge University Press: 22 February 2011
Abstract
We present an overview of the thermal modeling of CW laser induced crystallization of SOI. The dynamical case for a three-layer structure is derived. Effects of the phase change (increase in reflectivity, latent heat) are also treated. Analytical expressions are given and the models are compared to experiment.
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- Copyright © Materials Research Society 1984
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