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CVD Diamond Thin Films for Alpha Particle Detector Application

Published online by Cambridge University Press:  21 March 2011

S. G. Wang ,
Q. Zhang ,
S. F. Yoon  and
J. Ahn
S. G. Wang
Affiliation:
Microelectronics Centre, School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore.
Q. Zhang
Affiliation:
Microelectronics Centre, School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore.
S. F. Yoon
Affiliation:
Microelectronics Centre, School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore.
J. Ahn
Affiliation:
Microelectronics Centre, School of Electrical & Electronic Engineering, Nanyang Technological University, Nanyang Avenue, Singapore 639798, Singapore.
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Abstract

In this paper, CVD diamond thin films for alpha particle detector have been prepared using hot-filament chemical vapor deposition (HFCVD) technique. Alpha particle detectors with coplanar and sandwich electrode geometry have been fabricated on the diamond films using liftoff technology. The detector performance has been tested using a 241 Am source with a characteristic energy of 5.5 MeV. An average charge collection efficiency of 32 % for the detector with coplanar and of 21 % for the detector with sandwich geometry is obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 692: Symposium H – Progress in Semiconductor Materials for Optoelectronic Applications , 2001 , H9.32.1
Copyright
Copyright © Materials Research Society 2002

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