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The Current And Future Status Of Diamond in Electronics

  • Paul R. Chalker (a1), Ian M. (a1) and Buckley Golder (a1)

Abstract

Both passive and active electronic applications of CVD diamond have been proposed since the earliest stages of its development, largely based on an extrapolation of the superlative properties of single crystal diamond. Consequently, CVD diamond research has striven hard to match up to this expectation and significant advances have been made.

CVD diamond compares favourably with natural or high pressure synthetic single crystal material for passive electronic applications. The development of CVD diamond deposition technology for thermal management has led producers to address issues such as production cost, yield and quality. CVD polycrystalline diamond is becoming a commodity material and commercial applications in thermal management are emerging. Many of these developments are expected to feed into active electronic applications and will act as a springboard for diamond into commercial technology.

The active electronic applications for diamond are more demanding in terms of materials and process technologies. For example, doping, structure delineation and contact schemes have been widely demonstrated and prototype devices are showing potential benefits in sensors, detectors, photonics and cold cathodes. The current and future status of diamond electronics is reviewed.

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References

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[1] Collins, A.T., Mater. Res. Soc. Symp. Proc., 162 (1990), p. 3.
[2] Ashcroft, N.W. and Mermin, N.D., Solid State Physics, W.B. Saunders Co. Philadelphia, PA, 1976.
[3] Graebner, J.E., Jin, S., Kammlott, G.W., Wong, Y.-H., Herb, J.A. and Gardinier, C.F., Diamond and Related Materials, 2 (1993), p. 1059.
[4] Graebner, J.E., Jin, S., Kammlott, G.W., Herb, J.A. and Gardinier, C.F., Nature, 359 (1992), p. 401.
[5] Sussmann, R.S., Brandon, J.R., Scarsbrook, G.A., Sweeney, C.G., Valentine, T.J., Whitehead, A.J. and Wort, C.J.H., Diamond and Related Materials, 3 (1994), p. 303.
[6] Eden, R.C., Materials Science Monographs, 73, Applications of Diamond Films and Related Materials, Tzeng, Y., Yoshikawa, M., Murakawa, M., Feldman, A. (Editors) Elsevier Science Publishes B.V., (1991), p. 259.
[7] Himpsel, F.J., Knapp, J.A., VanVechten, J.A. and Eastman, D.E., Phys. Rev. B 20(2) (1979), p. 624.
[8] Pate, B.B., Surface Science, 165 (1986), p.83.
[9] Nemanich, R.J., Bergman, L., Turner, K.F., Van der Weide, J. and Humphreys, T.P., Physica B 185 (1993), p.528.
[10] Van der Weide, J. and Nemanich, R.J., J. Vac. Sci. Technol. B 12 (1994), p.2475.
[11] Van der Weide, J., Zhang, Z., Baumann, P.K., Wensell, M.G., Bernholc, J. and Nemanich, R.J., Physical Review B 50 (1994), p.5803.
[12] Van der Weide, J. and Nemanich, R.J., J. Vac. Sci. Technol. B 10 (1992), p. 1940.
[13] Van der Weide, J. and Nemanich, R.J., Physical Review B 49 (1994), p. 13629.
[14] Baumann, P.K., Humphreys, T.P. and Nemanich, R.J., Mater. Res. Soc. Symp. Proc. Vol.339 (1994), 69
[15] Baumann, P.K. and Nemanich, R.J., Applications of Diamond Films and Related Materials, NIST Special Publication 885, Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., Murakawa, M., (Editors) (1995), p. 41.
[16] Prins, J.F., Diamond and Related Materials 4 (1995), p.580.
[17] Prawer, S., Uzan-Saguy, C., Braunstein, G. and Kalish, R., Appl. Phys. Lett. 63 (18), (1993), p. 2502.
[18] Mearini, G.T., Krainsky, I.L. and Dayton, J.A., Jr, Applications of Diamond Films and Related Materials, NIST Special Publication 885, Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., Murakawa, M., (Editors) (1995), p. 13.
[19] Kang, W.P., Davidson, J.L., Li, Q., Xu, J.F., Kinser, D.L. and Kerns, D.V.,, Applications of Diamond Films and Related Materials, NIST Special Publication 885, Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., Murakawa, M., (Editors) (1995), p. 37.
[20] Givargizov, E.I., Zhirnov, V.V., Stepanova, A.N., Rakova, E.V., Kiselev, A.N. and Plekhanov, P.S., Applied Surface Science, 87/88 (1995), p. 24
[21] Hong, D. and Aslam, M., Applications of Diamond Films and Related Materials, NIST Special Publication 885, Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., Murakawa, M., (Editors) (1995), p.49
[22] Shikata, S., Nakahata, H., Higaki, K., Fujii, S., Hachigo, A., Kitabayashi, H., Seki, Y., Tenabe, K. and Fujimori, N., Applications of Diamond Films and Related Materials, NIST Special Publication 885, Feldman, A., Tzeng, Y., Yarbrough, W.A., Yoshikawa, M., Murakawa, M., (Editors) (1995), p.29.
[23] Chalker, P.R., Johnston, C., Crossley, J.A.A., Ambrose, J.C., Ayres, C.F., Harper, R.E., Buckley-Golder, I.M. and Kobashi, K., Diamond and Related Materials, 2 (1993), p.1100.
[24] Roppel, T., Ramesham, R., Ellis, C. and Lee, S.Y., Thin Solid Films 212 (1992) 56
[25] Kang, W.P., Gurbuz, Y., Davidson, J.L. and Kerns, D.V., J. Electrochem Soc. Vol.141(8) (1994), p. 2251.
[26] Dorsch, O., Holzner, K., Werner, M., Obermeier, E., Harper, R.E., Johnston, C., Chalker, P.R. and Buckley-Golder, I.M., Diamond and Related Materials, 2 (1993), p. 1096.
[27] Totterdell, D.H.J. and Chalker, P.R., European Patent Application EP 0 579 405 Al
[28] Buckley-Golder, I.M., Chalker, P.R., Johnston, C., Romani, S. and Werner, M., Advances in New Diamond Science and Technology, Saito, S., Fujimori, N., Fukunaga, O., Kamo, M., Kobashi, K., Yoshikawa, M., Eds. MYU, Tokyo, (1995) p. 669.
[29] Dorsch, O., Holzner, K., Werner, M., Obermeier, E., Harper, R.E., Johnston, C., Chalker, P.R. and Buckley-Golder, I.M., Diamond and Related Materials, 2 (1993), p. 1096.
[30] Kania, D.R., Landstrass, M.I., Plano, M.A., Pan, L.S. and Han, S., Diamond and Related Materials 2 (1993), p. 1012.
[31] Binari, S.C., Marchywka, M., Koolbeck, D.A., Dietrich, H.B., Moses, D., Diamond and Related Materials 2 (1993), p. 1020.
[32] Sugino, T., Itagaki, T. and Shirafuji, J., Proceedings of Diamond Films ‘95. To be published.
[33] Jiang, X., Klages, C.P., Zachii, R., Hartweg, M. and Füsser, H.J., Appl. Phys. Lett., 62 (1993), p. 3438.
[34] Wolter, S.D., Stoner, B.R., Glass, J.T., Ellis, P.J., Buhaenko, D.S., Jenkins, C.E. and Southworth, P., Appl. Phys. Lett., 62 (1993), p. 1215.
[35] Yugo, S., Kimura, T. and Kania, H., Proc. First Int. Conf. on the New Diamond Science and Technology, KTK Scientific Publishers, Tokyo, (1990), p. 119.
[36] Chalker, P.R., Johnston, C., Romani, S., Ayres, C.F., Buckley-Golder, I.M., Krötz, G., Angerer, H., Müller, G., Veprek, S., Kunstmann, T., Legner, W., Smith, L.M., Leese, A.B., Jones, A.C. and Rushworth, S.A., Diamond and Related Materials 4 (1995), p. 632.
[37] Fox, B.A., Hartsell, M.L., Malta, D.M., Wynands, H.A., Kao, C.-T., Plano, L.S., Tessmer, G.J., Hernard, R.B., Holmes, J.S., Tessmer, A.J. and Dreifus, D.L., Diamond and Related Materials 4 (1992), p. 622.
[38] Physics World, March 1995.

The Current And Future Status Of Diamond in Electronics

  • Paul R. Chalker (a1), Ian M. (a1) and Buckley Golder (a1)

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