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Crystallization of Amorphous Silicon-Aluminum thin Films: IN-SITU Observation and Thermal Analysis.

  • Toyohiko J. Konno (a1) and Robert Sinclair (a1)

Abstract

The crystallization of sputter-deposited Si/Al amorphous alloys was examined by transmission electron microscopy (TEM) and differential scanning calorimetry (DSC). In-situ high-resolution TEM reveals the existence of an Al layer between the amorphous matrix and the growing crystalline phase. The activation energy for the growth is about 1.2eV, roughly corresponding to the activation energy of Si diffusion in Al. These two observations support the view that a crystallization mechanism, in which an Al buffer layer provides the shortest reaction path, is responsible for the reaction. The product microstructure exhibits secondary crystallization at a higher temperature.

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1. Herold, U. and Koster, U., Rapidly Quenched Metals III, edited by Cantor, B., The Metals Society, London, vol. 1, p. 281290 (1978)
2. Koster, U. and Weiss, P., J.Non-Cryst Solids, 17, 359368 (1975)
3. McCaldin, J. O. and Sankur, H., Appl. Phys. Lett., 12, 524527 (1971)
4. Koster, U., Acta Metall., 20, 13611370 (1972)
5. Barbee, T. W. Jr and Keith, D. L., in Synthesis and Properties of Metastable Phases, edited by Machlin, E.S. and Rowland, T.J., The Metallugical Society of AIME, 93113 (1980)
6. Bravman, J. C. and Sinclair, R., J. Electron Microscope Technique, 1, 5361 (1984)
7. Roberts, S. and Dobson, P. J., Thin Solid Films, 135, 137148 (1986)
8. Konno, T. J. and Sinclair, R., Mats. Res. Soc. Proc., 230, in press (1992)
9. Morgiel, J., Wu, I. W., Chiang, A. and Sinclair, R., Mats. Res. Soc. Proc., 182, 191194 (1990)
10. Zellama, K., Germain, P., Squelard, S., Bourgoin, J. C and Thomas, P. A., J. Appl. Phys., 50, 69957000(1979)

Crystallization of Amorphous Silicon-Aluminum thin Films: IN-SITU Observation and Thermal Analysis.

  • Toyohiko J. Konno (a1) and Robert Sinclair (a1)

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