Skip to main content Accessibility help
×
Home

Crystallinity and Optoelectronic Properties of μc-SiC:H

  • F. Demichelis (a1), G. Crovini (a1), c. Osenga (a1), C. F. Pirri (a1), E. Tresso (a1) and L. Boarino (a2)...

Abstract

Samples of μc-Si1-xCx:H with different degree of crystallinity and different carbon content were deposited by Plasma Enhanced Chemical Vapor Deposition and characterized by means of optical, electrical and structural measurements. The correlation between the degree of crystallinity and the mechanism of conductivity and optical transitions in both amorphous and crystalline phases and at the crystalline-amorphous interfaces is reported and discussed in terms of a band structure model.

Copyright

References

Hide All
1) Kanicki, J. - “Amorphous and microcrystalline semiconductors devices: optoelectronic devices” (Artech House, Boston 1991)
2) Martins, R., Willeke, G., Fortunato, E., Ferreira, I., Vieira, M., Santos, M., Macaneo, A. and Guinaraes-Journ, L.. of Non-Crystalline Solids 114, 486 (1989)
3) Lucovsky, G. and Wang, C. - “Amorphous Silicon Technology” - edited by Madan, A., Thompson, M.J., Taylor, P.C., Hamakawa, Y., LeComber, P.G. - MRS Proceedings vol. 219 (Pittsburgh, Pennsylvania: Material Research Society) p. 377 (1991)
4) Demichelis, F., Pirri, C.F. and Tresso, E. - “Wide Band-Gap Semiconductors” - edited by Moustakas, T.D., Pankove, J.I., Hamakawa, Y. - MRS Proceedings vol. 242 (Pittsburgh, Pennsylvania - Material Research Society) p. 675 (1992)
5) Demichelis, F., Pini, C.F. and Tresso, E. - Phil. Mag. B 66 (1992 in press)
6) Demichelis, F., Pini, C.F. and Tresso, E. - Phil. Mag. B 66, 135 (1992)
7) Demichelis, F., Pirri, C.F., Rava, P., Battezzati, L. and Tresso, E. presented at this conference
8) Seto, J.W. - J. Appl. Physics 46, 5247 (1975)
9) Baccarini, G., Riccoi, B., Spadini, G. - Journ. of Appl. Physics 49, 5565 (1978)
10) DasGupta, D., Demichelis, F., Tagliafeno, A. - Phil. Mag. B 63, 1255 (1991)
11) Komuro, S., Aoyagi, Y., Namba, S., Masuyama, A., Matsuda, A., Tanaka, K. - Journ. of Appl. Phys. 56, 1658 (1984)
12) Mott, N.F. and Davis, E.A. - “Electronic Processes in Non-Crystalline Materialsecond edition (Oxford University Press)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed