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Cross-Sectional and Plan-View Observation of Cracks Introduced in Si at the Ductile-Brittle Transition Temperature

  • Suprijadi (a1) and H. Saka (a1)

Abstract

Mode I cracks introduced in Si at the ductile-brittle transition temperature (DBTT) have been examined extensively using transmission electron microscopy. Cross-sectional as well as plane-view specimens suitable for the observation were prepared using a focused ion beam technique. Many small dislocation loops nucleate at the fracture surface of a mode I crack during the propagation at DBTT.

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Cross-Sectional and Plan-View Observation of Cracks Introduced in Si at the Ductile-Brittle Transition Temperature

  • Suprijadi (a1) and H. Saka (a1)

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