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Corrosion and Protection of Thin Metallic Films

Published online by Cambridge University Press:  21 February 2011

V. Brusic  and
G. S. Frankel
V. Brusic
Affiliation:
IBM Research Division, TJ. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598
G. S. Frankel
Affiliation:
IBM Research Division, TJ. Watson Research Center, P.O. Box 218, Yorktown Heights, NY 10598
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Abstract

Well known principles governing metallic corrosion are summarized in this paper. Severalelectrochemical techniques that are suitable for evaluation of corrosion reactions and mechanisms are discussed. The challenge of minimizing metallic degradation in processing, in storage and during operation is discussed with examples drawn from thin films used inthe electronics industry.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 309: Symposium M2 – Materials Reliability in Microelectronics III , 1993 , 437
Copyright
Copyright © Materials Research Society 1993

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