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Correlations Between YBa2Cu3O7-δ Thin Film Materials Properties and RF Device Performance

Published online by Cambridge University Press:  15 February 2011

T. S. Kaplan ,
M. T. Salazar ,
Q. Huang ,
A. Barfknecht  and
Z. Lu
T. S. Kaplan
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale CA 94086
M. T. Salazar
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale CA 94086
Q. Huang
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale CA 94086
A. Barfknecht
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale CA 94086
Z. Lu
Affiliation:
Conductus, Inc., 969 W. Maude Ave., Sunnyvale CA 94086
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Abstract

Better knowledge of the relationships between YBa2Cu307-δ (YBCO) materials properties and the RF performance of devices made from these materials should lead to improved device performance and yields. A variety of materials tests were performed on our production YBCO films which were patterned into standard microstrip resonators. The materials parameters were then compared with the unloaded Q of the resonators at 77 K. As expected, films with higher Q's tended to have higher Tc, higher Jc, greater film thickness, and better crystallinity. The last was based on narrower YBCO rocking curve peak, lower second phase density (judged by lower resistivity and greater θ-2θ (005) peak area), and a narrower θ-2θ (005) peak. The room temperature sheet resistance was found to be a useful predictor of microwave performance for films that are otherwise similar.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 474: Symposium L – Epitaxial Oxide Thin Films III , 1997 , 99
Copyright
Copyright © Materials Research Society 1997

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References

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