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Copper Film Deposition Using H and O Atoms

  • Judith Ann Halstead (a1), Peter S. Locke (a2) and Robert R. Reeves (a2)

Abstract

The formation of thin copper films by H-atom reaction with Cu(FOD)2 and Cu(HFA)2 has been demonstrated at near room temperature. Oxygen atoms have now also been reacted with these β-diketonate copper complexes, producing films of copper oxide which can be readily reduced by subsequent treatment with H-atoms. The thin copper films produced are conductive and highly adherent. The oxygen atom reaction with the copper complex produces a visible chemiluminescent glow, yielding information on the nature of the reaction process.

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1. Van Hemert, R. L., Spendlove, L. B. and Sievers, R. B., J. Electrochem. Soc., 112, 1123(1965).
2. Kaloyeros, A. E., Feng, A., Garhart, J., Brooks, K. C., Gosh, S. K., Saxena, A. N. and Luethrs, F., J. Electronic Mat., 19, 271 (1990).
3. Lai, W. G., Xie, Y. and Griffin, G. L., J. Electrochem. Soc., 138, 3499 (1991).
4. Armitage, D. N., Dunhill, N. I., West, R. H. and Williams, J. O., J. Crystal Growth, 108, 683 (1991).
5. Temple, D. and Reisman, A., J. Electrochem. Soc., 136, 3525 (1989).
6. Kaloyeros, A. E., Dettelbacher, C., Eisenbraun, E. T., Lanford, W. A., Li, H., Olowolafe, J. F., Murarka, S., Pintchovski, F., Sky, Y. and Toscano, P. J., Mat. Ros. Soc. Symp. Proc., 1991 Spring Meeting.
7. Jain, A., Chi, K. M., Kodas, T. T., Hampden-Smith, M. J., Fair, J. D., and Paffett, M. F., Chem. Mater., 3, 995 (1991).
8. Cohen, S. L., Liehr, M. and Kasi, S., Appl. Phys. Lett., 60, 50 (1992).
9. Brecelj, F. and Mozetic, M., Vacuum, 40, 177 (1990).
10 Li, H. and Reeves, R.R., Mat. Res. Soc. Symp. Proc., 203, 341 (1991).

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