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Control Over Al2O3 Phase by Use Of Polymer Precursors

  • William S. Rees and Werner Hesse (a1)

Abstract

Reaction of Et2AIOEt with ethylene glycol or catechol produced polymers of the general form -[-AI(OEt)-O-R-O-]-n, for R = CH2CH2 or C6H4, respectively. Pyrolytic conversion of these polymers to ceramic materials produced A12O3, at mild (∼500°C) temperatures under a flowing atmosphere of dry air. The crystal phase obtained from the thermolysis is highly dependent upon the degree of cross-linking present in the initial polymer. These results are discussed in terms of the required solid-state atomic reorganization necessary to proceed from polymer to ceramic.

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6. a) Rees, W. S. Jr., Hesse, W., in “Chemical Perspectives of Microelectronic Materials II,” Interrante, L. V., Jensen, K. F., DuBois, L. H., Gross, M. E., Eds., Materials Research Society Symposium Proceedings, Volume 204; Materials Research Society: Pittsburgh, Pennsylvania, 1991, pp. 563570. b) W. S. Rees, Jr., W. Hesse, Polymer Preprints, 1991, 32 (3), pp. 573-574.

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