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Confinement Effects in Nanoscale Anodic Alumina Structures on Silicon

Published online by Cambridge University Press:  01 February 2011

Patrick J. Griffin
Affiliation:
Materials Science Program
Robert W. Carpick
Affiliation:
Materials Science Program Engineering Physics Department
Donald S. Stone
Affiliation:
Materials Science Program Materials Science and Engineering Department, University of Wisconsin-Madison, Madison, WI 53706, U.S.A.
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Abstract

Anodic aluminum oxide (AAO) has long been considered a viable material for templated growth of nanomaterials for electronic, magnetic and optical applications due to the ability to form self-organized, high aspect-ratio nanochannels. More recently these porous materials have been incorporated with silicon to create a template for nanostructured materials on a semiconducting substrate. However, there has been no investigation into how pore growth is affected by confining the pre-anodized aluminum dimensions to the nanometer scale. We have used electron beam lithography to pattern 200 nm thick aluminum structures on Si with lateral features ranging from 100 nm to several microns in size. Structures consisting of 1 – 10 individual pores 10 – 15 nm in diameter are routinely fabricated. Confinement effects in the narrowest features assist in pore ordering in the porous structures without the use of pre-patterning or a two step anodization.

Type
Research Article
Copyright
Copyright © Materials Research Society 2005

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References

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