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Conducting Polymer Films by Ion Implantation

Published online by Cambridge University Press:  21 February 2011

P.H. Lu ,
R.A. Moody  and
I.H. Loh
P.H. Lu
Affiliation:
Spire Corporation, Patriots Park, Bedford, MA 01730
R.A. Moody
Affiliation:
Spire Corporation, Patriots Park, Bedford, MA 01730
I.H. Loh
Affiliation:
Spire Corporation, Patriots Park, Bedford, MA 01730
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Abstract

Insulating polymeric sheets were made electrically conductive by ion implantation. The effects of implantation parameters, such as ion species, dose, energy, beam current density, and substrate temperature, on the resultant sheet resistivities were investigated. Surface structural changes of implanted polymers were evaluated by X-ray photoelectron spectroscopy (XPS), Rutherford backscattering spectroscopy (RBS), and Fourier transform infared spectroscopy (FTIR). Electron spin resonance (ESR) and temperature dependent resistivity measurements were performed to explore the conduction mechanisms of implanted polymers. The results indicate that ion beam modification of polymers proceeds via a similar mechanism as high temperature pyrolysis. The resultant carbon-enriched materials which can be described by the conducting grain model.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 154: Symposium K – Electronic Packaging Materials Science IV , 1989 , 357
Copyright
Copyright © Materials Research Society 1989

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