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The “Computer-Aided Epitaxy” Si:MBE-Control System

  • R. A. Kubiak (a1), S. M. Newstead (a1), A. R. Powell (a1), D. K. Bowen (a1), R. D. Barlow (a1), M. G. Dowsett (a1), T. E. Whall (a1) and E. H. C. Parker (a1)...

Abstract

A dedicated, grower-friendly MBE computer control system is described, and its performance in demonstrated in growth of high resolution doped SiGe structures.

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References

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1. Kasper, E. and Parker, E. H. C. (editors) 3rd International Symposium on Silicon MBE Thin Solid Films 183 (1989)
2. Kasper, E. and Bean, J. C. (editors) Silicon-Molecular Beam Epitaxy. CRC Press (1988)
3. Precision Epitaxy Ltd. Coventry. UK
4. Kubiak, R. A., Newstead, S. M., Powell, A. R., Parker, E. H. C., Whall, T. E., Naylor, T. and Bowen, D. K.. J. Vac. Sci. Technol., in print Aug/Sept issue (1991)
5. Powell, Adrian, Kubiak, Richard, Parker, Evan, Bowen, Keith and Polcarova, Milena. MRS Proc Fall (1990).
6. Powell, A. R., Kubiak, R. A. A., Newstead, S. M., Parry, C., Mattey, N. L., Smith, D. W., Brighten, J. C., Emeleus, C. J., Naylor, T., Basaran, E., Whall, T. E., Dowsett, M. G., Barlow, R. D., Parker, E. H. C. and Bowen, D. K., J. Crystal Growth, 111 (1991)
7. Powell, A. R., Mattey, N. L., Kubiak, R. A. A., Parker, E. H. C. and Bowen, D. K.., Semicond. Sci. Technol. 6 227 (1991)
8. Mattey, N. L., Phillips, P. J., Kubiak, R. A., Parker, E. H. C. and Whall, T. E.. Weak localization and electron-electron effects in B-5 layers. In preparation
9. Powell, A. R., Kubiak, R. A. A., Whall, T. E. and Bowen, D. K.., J. Phys. D: Appl. Phys. 23 1745 (1990)
10. Common User Access. Advanced Interface Design Guide. IBM. (1989)
11. Adams, D.. The hitch-hikers guide to the galaxy. (Pan Books London 1979)

The “Computer-Aided Epitaxy” Si:MBE-Control System

  • R. A. Kubiak (a1), S. M. Newstead (a1), A. R. Powell (a1), D. K. Bowen (a1), R. D. Barlow (a1), M. G. Dowsett (a1), T. E. Whall (a1) and E. H. C. Parker (a1)...

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