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Comprehensive Study of Impact Ionization Coefficients of 4H-SiC

  • T. Hatakeyama (a1), T. Watanabe (a1), K. Kojima (a2), N. Sano (a3), T. Shinohe (a1) and K. Arai (a2)...

Abstract

The electric field dependence and anisotropy of the impact ionization coefficients of 4H-SiC are investigated by means of the avalanche breakdown behavior of p+n diodes. The breakdown voltages as a function of doping density and the multiplication factors of a leakage current are obtained using p+n diode fabricated on (0001) and (1120) 4H-SiC epitaxial wafers. The obtained impact ionization coefficients show large anisotropy; the breakdown voltage of a p+n diode on (1120) wafer is 60% of that on (0001) wafer. We have shown that anisotropy of the impact ionization coefficients is attributable to the anisotropy of saturation velocity originated from the electronic structure of 4H-SiC.

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[1] Konstantinov, A.O, Wahab, Q., Nordell, N., and Lindefelt, U.: Appl. Phys. Lett. Vol. 71 (1997), p. 90
[2] Raghunathan, R., and Baliga, B. J.: Solid-State Electron. Vol. 43 (1999), p.199
[3] Nakamura, S., Kumagai, H., Kimoto, T., and Matsunami, H.: Appl. Phys. Lett. May 6, Vol. 80 (2002), p. 3355
[4] Kojima, K., Ohno, T., Fujimoto, T., Katsuno, M., Ohtani, N., Nishio, J., Ishida, Y., Takahashi, T., Suzuki, T., Tanaka, T. and Arai, K.: Appl. Phys. Lett., Vol. 81 (2002), p. 2974
[5] Chynoweth, A. G.: Phys. Rev., vol. 109, no. 5 (1958), p. 1537
[6] Hjelm, M., Nilsson, H-E, Martinez, A., Brennan, K. F., and Bellotti, E.: J. of Appl. Phys. Vol. 93(2003), p. 1099
[7] Khan, I.A., Cooper, J. A. Jr., : Mater. Sci. Forum, Vol. 338–342(2000), p.761–4 PD:2000

Comprehensive Study of Impact Ionization Coefficients of 4H-SiC

  • T. Hatakeyama (a1), T. Watanabe (a1), K. Kojima (a2), N. Sano (a3), T. Shinohe (a1) and K. Arai (a2)...

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