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The Composition Dependence of the Interdiffusivity in Artificial Amorphous Si/Ge Multilayers

  • S. M. Prokes (a1) and F. Spaepen (a1)

Abstract

The interdirfusivity in artificial amorphous Si/Ge multilayers is found to be strongly dependent on the average composition of the films. The interdirfusivity of films with different average composition was determined from the decay of the first X-ray satellite. The nonlinear diffusion resulting from the composition dependence was observed by the evolution of the higher-order satellites.

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The Composition Dependence of the Interdiffusivity in Artificial Amorphous Si/Ge Multilayers

  • S. M. Prokes (a1) and F. Spaepen (a1)

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