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Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites

  • Abu Samah Zuruzi (a1), Marcus S. Ward (a1), Chang Song Ding (a2) and Noel C. MacDonald (a1) (a2)

Abstract

Integrated micrometer scale interpenetrating Au-Nanostructured TiO2 (NST) network nanocomposites have been fabricated using a two step process. First, NST pad arrays were prepared by reacting Ti surfaces, patterned with an SiO2 masking layer, with aqueous H2O2. NST formed is porous with pores 50 to 200 nm in diameter and walls about 75 to 125 nm thick. Second, Au was infiltrated into pores of NST using electroless deposition to form the nanocomposite. SEM studies indicate that Au was deposited into pores of NST with little void formation. Selective deposition of Au on NST pads was confirmed using XRD and area-mode XPS. This process is a general route to forming micrometer-scale nanocomposite features consisting of NST and metals that are amenable to electroless deposition.

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Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites

  • Abu Samah Zuruzi (a1), Marcus S. Ward (a1), Chang Song Ding (a2) and Noel C. MacDonald (a1) (a2)

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