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Composite Contacts in Microsystems: Fabrication of Metal-Nanostructured Titania Nanocomposites

Published online by Cambridge University Press:  01 February 2011

Abu Samah Zuruzi ,
Marcus S. Ward ,
Chang Song Ding  and
Noel C. MacDonald
Abu Samah Zuruzi
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA.
Marcus S. Ward
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA.
Chang Song Ding
Affiliation:
Mechanical and Environmental Engineering Department, University of California, Santa Barbara, CA 93106, USA.
Noel C. MacDonald
Affiliation:
Materials Department, University of California, Santa Barbara, CA 93106, USA. Mechanical and Environmental Engineering Department, University of California, Santa Barbara, CA 93106, USA.
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Abstract

Integrated micrometer scale interpenetrating Au-Nanostructured TiO2 (NST) network nanocomposites have been fabricated using a two step process. First, NST pad arrays were prepared by reacting Ti surfaces, patterned with an SiO2 masking layer, with aqueous H2O2. NST formed is porous with pores 50 to 200 nm in diameter and walls about 75 to 125 nm thick. Second, Au was infiltrated into pores of NST using electroless deposition to form the nanocomposite. SEM studies indicate that Au was deposited into pores of NST with little void formation. Selective deposition of Au on NST pads was confirmed using XRD and area-mode XPS. This process is a general route to forming micrometer-scale nanocomposite features consisting of NST and metals that are amenable to electroless deposition.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 872: Symposium J – Micro- and Nanosystems—Materials and Devices , 2005 , J18.21
Copyright
Copyright © Materials Research Society 2005

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