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Composite Biomolecular/Solid State Nanostructures

  • Kenneth Douglas (a1), Noel A. Clark (a1) and Kenneth J. Rothschild (a2)

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Parallel nanometer molecular lithography has recently been demonstrated to be a parallel fabrication process for structures with features defined by single molecules [1]. In this process two dimensional (2d) monolayer protein crystals are used as patterning elements in the parallel fabrication of structures on the 10nm length scale (nanostructures). The parallelism of this technique is in contrast to such serial fabrication methods as x-ray and electron-beam lithography.

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1. Douglas, K., Clark, N.A., and Rothschild, K.J., Appl. Phys. Lett. 48, 676 (1986).
2. Nermut, M.V., Trends in Biochem. Sci. 8, 303 (1983).
3. Rash, J.E. and Hudson, C.S. (editors), Freeze-Fracture; Methods, Artifacts and Interpretations, Raven Press, New York (1979).
4. Powell, R.A. (editor), Dry Etching for Microelectronics, Elsevier, Amsterdam, 1984, p. 119.
5. Douglas, K., Clark, N.A., and Rothschild, K.J., to appear in Applied Physics Letters.
6. Digital Instruments, Inc., 6780 Cortona Drive, Santa Barbara, California 93117.
7. Taylor, K.A., Deatherage, J.F., and Amos, L.A., Nature 299, 840 (1982).

Composite Biomolecular/Solid State Nanostructures

  • Kenneth Douglas (a1), Noel A. Clark (a1) and Kenneth J. Rothschild (a2)

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