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Comparison of (L)M(thd)2 (M = Mg, Ca, Sr, Ba; L = Tetraglyme, Pmdeta) Precursors for High K Dielectric Mocvd

  • G. Bhandari (a1), T. E. Glassman (a1), D. B. Studebaker (a1), G. Stauf (a1) and T. H. Baum (a1)...

Abstract

High-purity alkaline earth ß-diketonate compounds such as [M(thd)2]x (M = Mg, Ca, Sr, Ba) have been utilized for liquid delivery MOCVD.[1] The “parent” compounds are oligomeric species with bridging ß-diketonate ligands and display both limited volatility and thermal instability. To enhance the precursor transport and film growth rates, Lewis base ligands are used to produce mononuclear precursors.[2] Lewis base coordinated metal (ß-diketonates) also exhibit increased solubilities in organic solvents. In this study, two classes of Group II ß-diketonates were compared; thermal stability and transport were evaluated by simultaneous thermal analyses, using both thermogravimetric (TGA) and differential scanning calorimetry (DSC). Liquid delivery and vaporization were evaluated in an “experimental” liquid delivery system and preliminary film growth, including electrical film properties were measured. The identity of the Lewis base and Group II precursor molecular structure as relates to liquid delivery vaporization and CVD film growth of BaxSr1–xTiO3 are described.

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Comparison of (L)M(thd)2 (M = Mg, Ca, Sr, Ba; L = Tetraglyme, Pmdeta) Precursors for High K Dielectric Mocvd

  • G. Bhandari (a1), T. E. Glassman (a1), D. B. Studebaker (a1), G. Stauf (a1) and T. H. Baum (a1)...

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