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Comparison of Lateral Field Emitter Characteristics for Titanium Silicide, Poly-Si, and Single Crystal Si Tip

Published online by Cambridge University Press:  10 February 2011

Moo-Sup Lim ,
Cheol-Min Park ,
Min-Koo Han  and
Yearn-Ik Choi
Moo-Sup Lim
Affiliation:
School of Electrical Engineering., Seoul National Univ., Seoul, 151-742, KoreaPhone: +82-2-880-7248, Fax: +82-2-873-0827, E-mail :, mkh@emlab.snu.ac.kr
Cheol-Min Park
Affiliation:
School of Electrical Engineering., Seoul National Univ., Seoul, 151-742, KoreaPhone: +82-2-880-7248, Fax: +82-2-873-0827, E-mail :, mkh@emlab.snu.ac.kr
Min-Koo Han
Affiliation:
School of Electrical Engineering., Seoul National Univ., Seoul, 151-742, KoreaPhone: +82-2-880-7248, Fax: +82-2-873-0827, E-mail :, mkh@emlab.snu.ac.kr
Yearn-Ik Choi
Affiliation:
School of Electrical Eng., Ajou Univ., Wonchun-dong, Suwon 442-749, Kyung-ki do, Korea
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Abstract

We have fabricated poly-Si, Si, and Ti-silicide field emitter arrays employing in-situ vacuum encapsulated lateral field emitter structures and investigated the field emission characteristics such as turn-on voltage, emission current density, and the stability of emission current. Although poly-Si and Si emitter have almost identical turn-on voltages, Si emitter has a sharper turn-on than poly-Si emitter due to its uniform surface. The current densities of poly-Si, and Si emtter are 0.47, 0.43 μA/tip respectively at anode to cathode voltage of 90 V. The turn-on voltage and current density of Ti-silicide emitter are about 31 V, and 1.81 μA/tip at VAK of 90 V. The data of the normalized current fluctuations indicate that Ti-silicide emitter has the most stable current.

Our experiment shows that Ti-silicide is most promising among these three materials due to its low work function, uniform surface, and the stable characteristics.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 509: Symposium C – Materials Issues in Vacuum Microelectronics , 1998 , 179
Copyright
Copyright © Materials Research Society 1998

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