Hostname: page-component-8448b6f56d-cfpbc Total loading time: 0 Render date: 2024-04-19T23:50:59.762Z Has data issue: false hasContentIssue false
  • English
  • Français

A Comparison Between Energetics of Decomposition and Photo-Deposition of Pd and Pt from Pd(C5 H5 )(C3 H5) and Pt(C5H5)(C3 H5)

Published online by Cambridge University Press:  25 February 2011

Karl-Heinz Emrich ,
G. T. Stauf ,
W. Hirschwald ,
S. Barfuss ,
P. A. Dowben ,
R. R. Birge  and
N. M. Boag
Karl-Heinz Emrich
Affiliation:
Institut für Physikalische Chemie, Freie Universität Berlin, Takustrasse 3, 1000 Berlin 33, Federal Republic of Germany
G. T. Stauf
Affiliation:
Laboratory for Solid State Science and Technology, Syracuse University, Syracuse, New York 13244-1130
W. Hirschwald
Affiliation:
Institut für Physikalische Chemie, Freie Universität Berlin, Takustrasse 3, 1000 Berlin 33, Federal Republic of Germany
S. Barfuss
Affiliation:
Laboratory for Solid State Science and Technology, Syracuse University, Syracuse, New York 13244-1130
P. A. Dowben
Affiliation:
Laboratory for Solid State Science and Technology, Syracuse University, Syracuse, New York 13244-1130
R. R. Birge
Affiliation:
Laboratory for Solid State Science and Technology, Syracuse University, Syracuse, New York 13244-1130
N. M. Boag
Affiliation:
Department of Chemistry and Applied Chemistry, Salford University, Salford, England
Get access

Abstract

The energetics of decomposition of a variety of organometallic compounds have been determined from photoionization mass spectroscopy and electron impact mass spectroscopy. In particular, Pd(C5H5)(C3H5) and Pt(C5H5)(C3H5) have been studied in this fashion, and the information used to make patterned Pd/Ni/Si heterostructures by laser induced photolysis of the palladium compound and nickelocene in vacuum (MOCVD). Contamination in the thin films was determined by Auger electron spectroscopy, and compared with that found by other researchers for photo-deposition of Pt from the cyclopentadiene allyl [1].Thermodynamic data is used to explain differing contamination levels in the Pd and the Pt coatings.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 131: Symposium E – Chemical Perspectives of Microelectronic Materials I , 1988 , 401
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

(1) Stauf, G.T. and Dowben, P.A., Thin Solid Films 156, L31–L36 (1988).Google Scholar
(2) Dowben, P.A., Spencer, J.T. and Stauf, G.T., Mater. Sci. & Eng. (1989) (in press).Google Scholar
(3) Ehrlich, D.J., Osgood, R.M. and Deutsch, T.F., J. Vac. Sci. Technol. 21, 23 (1982).Google Scholar
(4) Jervis, T.R. and Newkirk, L.R., J. Mater. Res. 1, 420 (1986).CrossRefGoogle Scholar
(5) Stauif, G.T., Driscoll, D.C., Dowben, P.A., Barfuss, S., and Grade, M., Thin Solid Films 153, 421 (1987).Google Scholar
(6) Stauf, G.T., Dowben, P.A., Emrich, K., Barfuss, S., Hirschwald, W., and Boag, N.M., J. Phys. Chem. 92, 1988 (in press).Google Scholar
(7) Stauf, G.T. and Dowben, P.A., Thin Solid Films 156, L31–L36 (1988).CrossRefGoogle Scholar
(8) Shriver, Duward F., Inorganic Syntheses vol.19, (John Wiley and Sons, New York, 1979), p. 220.CrossRefGoogle Scholar
(9) Grade, M., Wienecke, J., Rosinger, W. and Hirschwald, W., Ber. Bunsenges. Phys. Chem. 87, 355 (1983).Google Scholar
(10) Rosinger, W., Grade, M. and Hirschwald, W., Ber. Bunsenges. Phys. Chem. 87, 536 (1983).Google Scholar