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Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE

  • Andreas Frank (a1), J.-P. Zoellner (a2), Y. Sarov (a3), Tz. Ivanov (a4), I. Kuhnholz (a5), St. Klett (a6), I. W. Rangelow (a7), M. Swiatkowski (a8), T. Gotszalk (a8) and N. Nikolov (a9)...

Abstract

In this paper we present a novel method of nonlinear macro model of a cantilever for mixed domain simulation only with SPICE. Based on lumped elements of equivalent circuits a model is developed, which realizes a coupled electro-thermal-mechanical simulation including crosstalk effects. The model is verified with measurement and helps to class and solve crosstalk. With SPICE as electrical circuit simulator the cantilever array could be simulate in conjunction with the excitations and analysis electronics more detailed like the system level models and faster like FEM-simulation.

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1. Rangelow, I. W. et al., Microelectronic Engineering 83 (2006), 14491455.
2. Mehner, J., “Entwurf in der Mikrosystemtechnik“, Dresden Univ. Press. 2000, ISBN 3-931828-47-6.
3. Schlegel, M., Bennini, F., Mehner, J.E., Herrman, G., Müller, G. and Dotzel, W., Sensors Journal, IEEE vol. 5, no 5 (2005) 10191026.
4. Iannacci, J., Gaddi, R., Gnudi, A., Mircowave Integrated Circuit Conference 2007, 544547.
5. Verd, J et al., Proc. SPIE Int. Soc. Opt. Eng. 5836, 98 (2005).
6. Kuijk, J. van, Schropfer, G., daSilva, M., Conventor, Design, Automation, and Test in Europe, 2005 Munich.
7. Mukherjee, T., Fedder, G. K., J. VLSI Signal Process. Syst 21 (1999), 233249.
8. Senturia, S. D.: “Microsystem Design“, Kluwer Acedemic Publishers 2001. ISBN-0-7923-7246-8
9. Rudnyi, E. B., Korvink, J. G., Sensors Update 11 (2002), 333.
10. Balk, I. “Arnoldy based passive model order reduction algorithm”, www.intellisensesoftware.com/.
11. Diener, K.-H., et. al., 22nd CAD-FEM Users Meeting 2004, Dresden, November 10-12, 2004.
12. Tilmann, H., J. Micromech. Microeng. 7 (1997) 285309.
13. Veijola, T., Mattila, T., Intern. J. of RF and Microwave CAD 11 no. 5 (2001) 310321.
14. Pedrak, R. at all., J. Vac. Sci. Technol. B 21.6., (2003), 31023107.
15. Ivanov, Tzv., PhD Thesis (2004)
16. Hosaka, H., Itao, K., Kuroda, S., Sensors and Actuators. A49 (1995) 8795.
17. Frank, A. et al., Parasitic effects in self-actuated piezoresistive cantilever arrays; will be published.

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Compact Modelling of Electrical, Mechanical and Thermal Behaviour for MEMS with SPICE

  • Andreas Frank (a1), J.-P. Zoellner (a2), Y. Sarov (a3), Tz. Ivanov (a4), I. Kuhnholz (a5), St. Klett (a6), I. W. Rangelow (a7), M. Swiatkowski (a8), T. Gotszalk (a8) and N. Nikolov (a9)...

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