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Combinatorial Synthesis and Characterization of Zinc-Tin-Oxide Transparent Conductors

  • J.D. Perkins (a1), J.A. del Cueto (a1), J.L. Alleman (a1), C. Warmsingh (a2), B.M. Keyes (a1), L.M. Gedvilas (a1), P.A. Parilla (a1), B. To (a1), D.W. Readey (a2) and D.S. Ginley (a1)...


In this work, we discuss the combinatorial deposition and analysis of transparent conducting oxides along the ZnO-SnO2 composition tie line. Libraries were deposited by co-sputtering from ZnO and Sn-metal targets. The production and analysis of Zn-Sn-O libraries has already produced significant results, confirming the properties of the 2:1 (Zn2SnO4) region and revealing a second region of interest, the 1:1(ZnSnO3) composition. Subsequent film growth of these stochiometries by pulsed laser deposition has confirmed the potential for both of these stochiometries. Work is currently underway to optimize both Zn2SnO4 and ZnSnO3. Planned future work includes a combinatorial investigation of ternary metal systems such as Zn-In-Sn-O.



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