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Combinatorial Fabrication and Study of Luminescent Nanocrystalline Si Particles Embedded in a SiO2 Matrix

  • Luis F Fonseca (a1), Oscar Resto (a2), S. Zvi Weisz (a3) and Joseph Shinar (a4)

Abstract

The combinatorial fabrication of nanocrystalline Si particles embedded in a SiO2 matrix (nc-Si:SiO2) by RF co-sputtering of Si and SiO2 targets is described. The peak of the photoluminescence (PL) spectra of the films varies systematically from 760 to 600 nm, consistent with the presumed systematic variation in the size distribution of the embedded Si particles. The correlation between the optical properties of the samples and the formation parameters is also analyzed.

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1. Tsybeskov, L., MRS Bulletin, April 1998, p. 33.
2. Canham, L. T., Appl. Phys. Lett. 57, 1046 (1990).
3. Kanemitsu, Y., Futagai, T., Matsumoto, T., and Mimura, H., Phys. Rev. B 49, 14732 (1994).
4. Wang, L.W. and Zunger, A., J. Phys. Chem. 98, 2158 (1994).
5. Delerue, C., Allan, G., and Lannoo, M., Phys. Rev. B 48, 11024 (1993).
6. Hill, N. A. and Whaley, K. B., Phys. Rev. Lett. 75, 1130 (1995).
7. Delerue, C., Allan, G., Lannoo, M., J. of Lumin. 80, 65 (1999).M. V. Wolkin, J. Jorne, P. M. Fauchet, G. Allan, and C. Delereu, Phys. Rev. Lett. 82, 197 (1999); A. Puzder, A. J. Williamson, J. C. Grossman, and G. Galli, J. Chem. Phys. 117 6721 (2002); J. S. Biteen, N. S. Lewis, H. A. Atwater, and A. Polman, Appl. Phys. Lett. 84, 5389 (2004)
8. Hayashi, S., Yamamoto, K., Kanzawa, Y. and Fujii, M., Mat. Sci. Eng. A 217–218, 155 (1996); Y. Kanzawa, M. Fujii, S. Hayashi and K. Yamamoto, Sol. St. Comm. 100, 227 (1996); Y. Kanzawa, T. Kageyama, S. Takeoka, M. Fujii, S. Hayashi, and K. Yamamoto, Sol. St. Comm. 102, 533 (1997); M. Fujii, S. Hayashi, and K. Yamamoto, J. Appl. Phys. 83, 7953–7957 (1998); A Mimura, M Fujii, S Hayashi, K Yamamoto, Sol. St. Comm. 109, 561 (1999). K. Sato, Y. Sugiyama, T. Izumi, M. Iwasw, Y. Show, S. Nozaki, H. Morisaki, Mat. Res. Soc. Symp. Proc. 536, 57 (1999).
9. Delerue, C., Lannoo, M., and Allan, G., J. Lumin. 57, 249 (1993).
10. Hanak, J. J., Lehman, H. W., and Wehner, R. K., J. Appl. Phys. 43, 1666 (1972).
11. Fonseca, L.F., Resto, O., Katiyar, R., Gupta, S., Weisz, S.Z., Goldstein, Y., Many, A., and Shapir, J., in Proceedings of the 24th International Conference on the Physics of Semiconductors, CD version (Jerusalem, Israel 1998).
12. Charvet, S., Madelon, R., Rizk, R., Garrido, B., González-Varona, O., López, M., Pérez-Rodríguez, A., and Morante, J. R., J. of Lumin. 80, 241 (1999).

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Combinatorial Fabrication and Study of Luminescent Nanocrystalline Si Particles Embedded in a SiO2 Matrix

  • Luis F Fonseca (a1), Oscar Resto (a2), S. Zvi Weisz (a3) and Joseph Shinar (a4)

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