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A Combinatorial Approach to TCO Synthesis and Characterization

  • John Perkins (a1), Dennis Readey (a2), Jeff Alleman (a1), Joe del Cueto (a1), Xiaonan Li (a1), Tim Coutts (a1), Renaud Stauber (a3), Chris Duncan (a2), David Young (a3), Phil Parilla (a3), Brian Keyes (a3), Lynn Gedvilas (a3), Davor Balzar (a4), Qi Wang (a1) and David Ginley (a1)...

Abstract

We have developed the deposition, characterization and analysis tools necessary for a combinatorial approach to thin film metal oxides, with a special focus on transparent conducting oxides (TCOs). We are presently depositing compositionally graded libraries using mutli-target sputtering and CVD. The initial collection of characterization tools includes UV/VIS/NIR transmission/reflection, FTIR reflectance, Raman scattering, 4-point conductivity, thickness, xray diffraction and electron microprobe. In addition to allowing for a more complete empirical optimization of TCO properties, we expect to develop an improved basic understanding of TCOs, especially in the area of p-type TCOs. This paper provides an overview of our current combinatorial material science program as applied specifically to TCOs.

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