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Combination of CBD and High Resolution with 400 kv

Published online by Cambridge University Press:  21 February 2011

S. Suzuki ,
T. Honda ,
Y. Kokubo  and
Y. Harada
S. Suzuki
Affiliation:
Jeol Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
T. Honda
Affiliation:
Jeol Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
Y. Kokubo
Affiliation:
Jeol Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
Y. Harada
Affiliation:
Jeol Ltd., 1418 Nakagami, Akishima, Tokyo 196, Japan
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Abstract

A new 400 kV electron microscope has been developed. It can combine high resolution (HR) image observation and convergent beam diffraction (CBD) analysis. The instrument is provided with a specimen height control (Z-control) system to get a wide range of illumination angles. In HR image observation, a resolving power of 0.18 nm is confirmed by ODM. Illumination angle of a converged beam can be changed from 1.0 mrad. to more than 10 mrad. using the Z-control system. Specimen height control is a very useful method to combine HR observation and CBD analysis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 31: Symposium N – Electron Microscopy of Materials , 1983 , 57
Copyright
Copyright © Materials Research Society 2006

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References

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