Hostname: page-component-8448b6f56d-t5pn6 Total loading time: 0 Render date: 2024-04-20T01:13:23.309Z Has data issue: false hasContentIssue false

Column IIIA Metal film Deposition by Laser Photoionization of Metal-Halide Molecules in the Vapor Phase

Published online by Cambridge University Press:  21 February 2011

D. B. Geohegan
Affiliation:
University of Illinois, Urbana, IL 61801
A. W. Mccown
Affiliation:
University of Illinois, Urbana, IL 61801
J. G. Eden
Affiliation:
University of Illinois, Urbana, IL 61801
Get access

Abstract

Films of Column IIIA metals (In, Tℓ and Aℓ) have been deposited on several different substrates (stainless steel, nickel and copper) by photoionizing the corresponding metal-iodide or bromide (such as TℓI, InI or AℓI3) in the vapor phase and in the presence of a uniform electric field. These experiments were prompted by the measurement of large photoionization cross-sections for ion production (i.e., MX + 2ħ ω → M+ + X + e- or MX + ħω → M+ + X-) in these molecules at 193 nm. The effective cross-sections for the photoionization of TℓI and InI at 193 nm have been measured to be 2.2·10−17 cm2 and < 7·10−18 cm2, respectively. Depletions of the metal-halide ground state greater than 60% have been observed for ArF peak laser intensities of only 5 MW − cm−2.

Type
Research Article
Copyright
Copyright © Materials Research Society 1984

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Tokuyama, T., Yagi, K., Miyake, K., Tamura, M., Natsuaki, N. and Tachi, S., Nucl. Instrum. Method 182/183, 241 (1983).Google Scholar
2. Thomas, G. E., Beckers, L. J., Brakking, J. J. and DeKoning, B. R., Cryst. Growth 56, 557 (1982).CrossRefGoogle Scholar
3. Zalm, P. C. and Beckers, L. J., Appl. Phys. Lett. 41, 167 (1982).CrossRefGoogle Scholar
4. Terenin, A., Phys. Z. Sowjetunion 2, 377 (1932).Google Scholar
5. Maya, J., IEEE J. Quant. Electron. QE–15, 579 (1979).Google Scholar
6. Ehrlich, D. J., Maya, J. and Osgood, R. M. Jr., Appl. Phys. Lett. 33, 931 (1978).CrossRefGoogle Scholar
7. Burnham, R., Appl. Phys. Lett. 30, 132 (1977).CrossRefGoogle Scholar
8. Such a scheme was described in Photonics Spectra, (July 1982), pp. 22, 24.Google Scholar
9. McCown, A. W., Ediger, M. N. and Eden, J. G., Phys. Rev. A 26, 3318 (1982)CrossRefGoogle Scholar