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Collisional Effects of Background Gases on Pulsed Laser Deposition Plasma Beams

  • David B. Geohegan (a1) and Alex A. Puretzky (a2)

Abstract

The penetration of energetic pulsed ablation plumes through ambient gases is experimentally characterized to investigate a general phenomenon believed to be important to film growth by pulsed laser deposition (PLD). Under typical PLD conditions involving background gases, the ion flux in the ablation plume is observed to split into distinct fast and slow components over a limited range of distances1,2 the fast component is transmitted with near-initial velocities and high kinetic energies, potentially damaging to growing films at these distances. Formation of the second, significantly-slowed component correlates with the bright contact front3 formation observed1,4 in fast ICCD imaging studies. This general effect is explored in detail for the case of yttrium ablation into argon, a single-element target into an inert gas.5 Time-resolved optical absorption spectroscopy and optical emission spectroscopy are employed to simultaneously view the populations of both excited and ground states of Y and Y+ for comparison with quantitative intensified-CCD photography of the visible plume luminescence and ion flux measurements made with fast ion probes during this phenomenon. these measurements confirm that, in addition to the bright significantly-slowed front which has been described by shock or drag propagation models1, a fast-component of target material is transmitted to extended distances for some ambient pressures with near-initial velocities.

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1 Geohegan, D. B., p. 28 in Laser ablation: Mechanisms and applications, ed. by Miller, J. C. and Haglund, R. F., Springer-Verlag, Heidelberg, (1991).
2 Geohegan, D. B., Ch. 5. IN Pulsed Laser Deposition of Thin Films, Chrisey, D. B. and Hubler, G. K. (eds.), Wiley, New York (1994) and references cited therein.
3 Roger, Kelly and Antonio, Miotello, (Ibid).Ch. 3.
4 Geohegan, D. B., Appl. Phys. Lett. 60, 2732 (1992).
5 Geohegan, D.B. and Puretzky, A.A., submitted to appl. Phys. Lett. . (1995).
6 Geohegan, D. B.,thin Solid Films . 220, 138 (1992).
7 Geohegan, D. B., p. 73 in Laser ablation of Electronic Materials: Basic Mechanisms and applications, ed. by Fogarassy, E. and Lazare, S., North Holland (1992).
8 Kools, J. C. S., J. appl. Phys. 74, 6401 (1993).
9 Geohegan, D. B., pp. 165185 in Excimer Lasers, NATO aSI Series E: applied Sciences Vol. 265, Laude, L. D. (éd.). Kluwer, Netherlands (1994).
10 Geohegan, D. B. and Mashburn, D. N., Appl. Phys. Lett. 55, 2345 (1989).
11 Goforth, R. R. and Koopman, David W., Phys. Fluids 17, 698 (1974).
12 Koopman, David W. and Goforth, R. R., Phys. Fluids 17, 1560 (1974).
13 Koopman, David W., Phys. Fluids. 15, 1959 (1972).

Collisional Effects of Background Gases on Pulsed Laser Deposition Plasma Beams

  • David B. Geohegan (a1) and Alex A. Puretzky (a2)

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