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Closed-Cell Mesostructured Porous Silica Films Templated by PS-b-PEO Without Additional Microporosity

Published online by Cambridge University Press:  01 February 2011

Kui Yu ,
Bernd Smarsly  and
Jeffrey Brinker
Kui Yu
Affiliation:
Sandia National Laboratories, MS 1349, Albuquerque, NM
Bernd Smarsly
Affiliation:
Center for Micro-Engineered Materials, Univ of New Mexico, Albuquerque, NM 87131, U.S.A.
Jeffrey Brinker
Affiliation:
Sandia National Laboratories, MS 1349, Albuquerque, NM Center for Micro-Engineered Materials, Univ of New Mexico, Albuquerque, NM 87131, U.S.A.
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Abstract

Mesostructured silica/diblock films with a 3D arrangement of spherical domains (bcc) were prepared through evaporation-induced self-assembly (EISA) using polystyrene-blockpoly( ethylene oxide) diblock copolymers as structure-directing agents and TEOS (Si(OCH2CH3)4) and/or MTES (Si(OCH2CH3)3CH3) as silica precursors. A detailed small angle x-ray scattering (SAXS) analysis of the calcined mesoporous films showed that, in contrast to recently reported studies, no additional microporosity due to the PEO was observed, indicating that the PEO block formed a layer at the interface between the PS domain and the silica matrix and thus contributed to the mesopore volume. These mesostructured porous silica films are believed to be the first in respect of isolated spheres with a 3D array distributed in a silica matrix without additional microporosity and with MTES as silica precursor. Such closed-cell mesostructured porous materials with high porosity and controllable hydrophobicity can be excellent candidates for low dielectric (K) insulator materials.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 728: Symposium S – Functional Nanostructured Materials through Multiscale Assembly and Novel Patterning Techniques , 2002 , S1.9
Copyright
Copyright © Materials Research Society 2002

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