Skip to main content Accessibility help
×
Home

Chemical Beam Deposition of Y2O3 Thin Films with An Ecr

  • Maurice Massimo (a1), Walter Varhue (a2), Edward Adams (a3) and Stephen Titcomb (a2)

Abstract

Stoichiometric thin films of Y2O3 have been deposited on Si at substrate temperatures as low as 300 °C by plasma enhanced chemical vapor deposition using an electron cyclotron resonance (ECR) source. The yttrium source was an organo-metallic compound which was sublimated and fed with He carrier gas into the reactor chamber. Good capacitance-voltage characteristic curves were obtained for the dielectric film and a relative electrical permittivity of 9.9 was measured. This technique is a useful means of depositing oxide ceramic films at low substrate temperatures.

Copyright

References

Hide All
1. Bade, J. P., Baker, E. A., Kingon, A. I., Davis, R. F., and Bachmann, K. J., J. Vac. Sci. Technol. B 8 (2) 327 (1990).
2. Minomo, S., Taniguchi, M., Ishida, Y., Sugiyo, M., Takahashi, T., Tonouchi, M., Kita, S. and Kobayashi, T., Jpn. J. of Appl. Phys., 27 (3) 411 (1988).
3. Aida, T., Tsukamoto, A., Imagawa, K., Fukazawa, T., Saito, S., Shindo, K., Takagi, K., and Miyauchi, K., Jpn. J. of Appl. Phys., 28 (4) L635 (1989).
4. Okada, M., Torninaga, K., Araki, T., Katayama, S. and Sakashita, Y., Jpn. J. of Appl. Phys., 29 (4) 718 (1990).
5. Kokai, H., Kashiwagi, K., Sakamoto, Y., Morikawa, T., and Murayama, Y., Jpn. J. of Appl. Phys. 28 (11) 2268 (1989).
6. Tsang, W. T., J. of Crystal Growth 95 121 (1989).
7. Hashimoto, C., Oikawa, H., and Honma, N., IEEE Trans. on Elec. Dev., 36 1 14 (1989).
8. Fukumoto, H., Imura, T., Osaka, Y., Appl. Phys. Lett. 55 (4) 360 (1989).
9. Goldstein, R. M., and Leonhard, F. W., Proc. Electron. Components Conf., Washington D. C. 312 (1967).
10. Young, L., “Anodic Oxide Films”, Academic Press Inc. New York, 12 (1961).
11. Bezuardenhout, D. F. and Pretovius, R., Thin Solid Films, 139 (2) 121 (1986).

Chemical Beam Deposition of Y2O3 Thin Films with An Ecr

  • Maurice Massimo (a1), Walter Varhue (a2), Edward Adams (a3) and Stephen Titcomb (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed