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Characterization Of Physically Vapor Deposited Af2400 Thin Films

  • R. Chow (a1), M. K. Spragge (a1), G. E. Loomis (a1), F. Rainer (a1), R. L. Ward (a1), I. M. Thomas (a1) and M. R. Kozlowski (a1)...

Abstract

Anti-reflective optical coatings made with Teflon AF2400 had the highest laser damage thresholds recorded for physical vapor deposited coatings at the Lawrence Livermore National Laboratory damage facility. Physical vapor deposited layers of Teflon AF2400, a perfluorinated amorphous polymer, Maintained the bulk optical properties of a high transmittance from 200 nm to 1200 nm, and a low refractive index. In addition, the refractive index can be intentionally reduced by control of two common deposition parameters, deposition rate and substrate temperature. Scanning electron microscopy and nuclear magnetic resonance observations indicated that morphological changes caused the variations in the refractive index rather than compositional changes. The coatings adhered to fused silica and silicon wafers under normal laboratory handling conditions.

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1. Thomas, I. M. and Campbell, J. H. in Laser-induced damage in optical Materials: 1990, eds. Bennett, H. E., Chase, L. L., Guenther, A. H., Newnam, B. E., and Soileau, M. J., (SPIE vol. 1441, Boulder, CO, 1990) pp. 294303.
2. Lowry, J. H., Mendlowitz, J. S., and Subramanian, N. S., Optical Engin. 31, 1982 (Sept. 1992).
3. Yoshida, K., Ochi, K., Namikawa, N., Kotera, T., and Yuki, L. in Laser-Induced Damage of Optical Materials: 1993, eds. Bennett, H. E., Chase, L. L., Guenther, A.H., Newnam, B. E., and Soileau, M. J., (to be published by SPIE, Boulder, CO, 1993).
4. Nason, T.C., Moore, J. A., and Lu, T. -M., Appl. Phys. Lett. 60, 1866 (13 Apr 1992).
5. Blanchet, G. B., Appl. Phys. Lett. 62, 479 (1 Feb. 1993).
6. Grieser, J., Swisher, R., Phipps, J., Pelleymounter, D., and Hildreth, E. in Optical Surfaces Resistant to Severe Environments, ed. Musikant, S., (SPIE vol. 1330, San Diego, CA, 11–12 July 1990) pp.111118.
7. Hiraoka, H. and Lazare, S., Appl. Surface Science 46, 342 (1990).
8. Douhlert, D. H., Experimental strategies for process variables. (The Experimental Strategies Foundation, Seattle, WA, 1991).
9. Morgan, A. J., Rainer, F., De Marco, F. P., Gonzales, R. P., Kozlowski, M. R., and Staggs, M. C. in Laser-Induced Damage of Optical Materials: 1989. eds. Bennett, H. E., Chase, L. L., Guenther, A. H., Newnam, B.E., and Soileau, M. J., (SPIE vol. 1438, Boulder, CO, 1989) pp. 4757.

Characterization Of Physically Vapor Deposited Af2400 Thin Films

  • R. Chow (a1), M. K. Spragge (a1), G. E. Loomis (a1), F. Rainer (a1), R. L. Ward (a1), I. M. Thomas (a1) and M. R. Kozlowski (a1)...

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