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Characterization of Pd/V Multilayer Structures by High-Angle Annular Dark-Field Microscopy and High Resolution Tem

  • J. Liu (a1), Y. Cheng (a2), G. D. Lewen (a2) (a3) and M. B. Stearns (a3)

Abstract

The structures of e-beam evaporated Pd/V multilayer thin films, which were fabricated at different substrate temperatures, have been characterized by high-angle annular dark-field microscopy and high resolution electron microscopy techniques. X-ray scattering and crosssectional electron microscopy showed that both the Pd and V layers are composed of small textured crystallites with dominant orientations of Pd (111) and V (110). It is found that Pd/V multilayers with high chemical modulation can be fabricated at substrate temperatures around 350 K and at a deposition rate of 0.2 nm/s. Here high-angle annular dark-field microscopy has been shown to provide direct information about the compositional variation of the interlayers of these ML.

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Characterization of Pd/V Multilayer Structures by High-Angle Annular Dark-Field Microscopy and High Resolution Tem

  • J. Liu (a1), Y. Cheng (a2), G. D. Lewen (a2) (a3) and M. B. Stearns (a3)

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